Abstract: In a method for producing an optical element for an EUV projection exposure apparatus, a shaping layer (221) is applied onto a substrate (20) so as to have a surface roughness of at most 0.5 nm rms directly after the application of the shaping layer onto the substrate.

Abstract: An optical element (1) includes: a substrate (2); applied to the substrate (2), a multilayer system (3) which reflects EUV radiation (4); and also applied to the multilayer system (3), a protective layer system (5) which comprises a first layer (5a), a second layer (5b) and a third, in particular topmost layer (5c), where the first layer (5a) is disposed closer to the multilayer system (3) than the second layer (5b), and where the second layer (5b) is disposed closer to the multilayer system (3) than the third layer (5c). The second layer (5b) and the third layer (5c) and also preferably the first layer (5a) each have a thickness (d2, d3, d1) of between 0.5 nm and 5.0 nm. A related EUV lithography system having at least one such optical element is also described.

Abstract: A robot structure, suited especially for minimally invasive surgery, comprises two robot elements interconnected by a hinge. Using a force transmission the movable robot element of said robot structure, notably comprising two gripping elements, can be moved. A sensor element is provided for picking up forces occurring. To reduce the influence of motional forces, said force transmission is connected with a base element of said sensor element such that motional forces transmitted by said force transmission element are supported at the base element.

Abstract: A robot structure, suited especially for minimally invasive surgery, comprises two robot elements interconnected by a hinge. Using a force transmission means the movable robot element of said robot element, notably comprising two gripping elements, can be moved. A sensor element is provided for picking up forces occurring. To reduce the influence of motional forces, said force transmission means is connected with a base element of said sensor element such that motional forces transmitted by said force transmission element are supported at the base element.

Abstract: An improved magnetic lens having a long focal length for the optical imaging of a specimen having a large surface area by means of a charged-particle beam. The lens includes a cylindrical coil including at least one winding which is surrounded by a field-carrying metallic shell member fabricated of magnetic material disposed at the radially outer surface of winding.