Patents by Inventor Matthias Vobl

Matthias Vobl has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Thin MEMS pump with membrane and valve lip structure
    Patent number: 11835041
    Abstract: A MEMS pump includes a basis structure, a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure and includes a pump chamber between the basis structure and the membrane structure wherein a volume of the pump chamber is based on a position of the membrane structure with respect to the basis structure. The MEMS pump includes a passage for letting a fluid pass into the pump chamber or exit the pump chamber, wherein the passage is arranged in-plane with respect to the pump chamber. The MEMS pump includes a valve structure coupled to the passage for connecting, in a first state, the passage to a first outer volume and for connecting, in a second state, the passage to a second outer volume.
    Type: Grant
    Filed: July 7, 2020
    Date of Patent: December 5, 2023
    Assignee: Infineon Technologies AG
    Inventors: Martin Seidl, Alfons Dehe, Daniel Fruechtl, Wolfgang Klein, Ulrich Krumbein, Johann Strasser, Matthias Vobl
  • Thin MEMS Pump
    Publication number: 20210040942
    Abstract: A MEMS pump includes a basis structure, a membrane structure opposing the basis structure and being deflectable parallel to a surface normal of the basis structure and includes a pump chamber between the basis structure and the membrane structure wherein a volume of the pump chamber is based on a position of the membrane structure with respect to the basis structure. The MEMS pump includes a passage for letting a fluid pass into the pump chamber or exit the pump chamber, wherein the passage is arranged in-plane with respect to the pump chamber. The MEMS pump includes a valve structure coupled to the passage for connecting, in a first state, the passage to a first outer volume and for connecting, in a second state, the passage to a second outer volume.
    Type: Application
    Filed: July 7, 2020
    Publication date: February 11, 2021
    Inventors: Martin Seidl, Alfons Dehe, Daniel Fruechtl, Wolfgang Klein, Ulrich Krumbein, Johann Strasser, Matthias Vobl