Abstract: A clutch friction disc (1) having at least two opposed annular friction linings (2, 2?), each fastened on a support (4, 4?), and elastic means (3) arranged between the supports (4, 4?) so as to allow the latter to move closer or farther away axially. Each support (4, 4?) has a tongue (6) for fastening to a central hub (12), located on the inner periphery of the support (4, 4?). Each fastening tongue (6) is retained axially between the hub (12) and a clamping washer (18) fastened to the hub (12) in order to prevent deformation of the tongue (6) during operation.

Abstract: The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II—II) extending transversely relative to an optical axis (I—I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I—I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2 in the transmission chamber (2) that is well below the pressure P1 in the irradiation chamber (1).

Abstract: The EUV radiation source of the invention comprises an irradiation chamber (1) containing an irradiation zone (3) into which a stream of radiation-generator material is generated such as a flow of xenon propagating along a direction (II-II) extending transversely relative to an optical axis (I-I). The irradiation zone (3) is in the proximity of a diaphragm (4) oriented on the optical axis (I-I) and putting the irradiation chamber (1) into communication with a transmission chamber (2). Power laser beams (5, 6) strike the stream of radiation-generator material in the irradiation zone (3) and produce EUV radiation which propagates through the diaphragm (4) and which is conditioned in the transmission chamber (2) by elliptical mirrors (13). Differential pumps (11, 12) maintain a pressure P2 in the transmission chamber (2) that is well below the pressure P1 in the irradiation chamber (1).