Abstract: A xy? precision alignment platform is provided. The alignment platform includes three power units and three moving platform. Two of the power units can drive a third moving platform moving in X or Y direction. The other power unit has a worm which can drive an arcuate teeth arrangement disposed between the second moving platform and the third moving platform to drive the third moving platform rotating. Whereby, since the worm is arranged to drive the arcuate teeth arrangement laterally, the alignment platform is thin and the rotative movement of the third moving platform can be precisely controlled. Additionally, each power unit may be electrically connected to a controller for respectively driving and controlling each power unit. When only the rotation of the third moving platform is required, only one of the power units needs to be driven, thus simplifying the operation of the alignment platform and improving the work efficiency.

Abstract: An XY all-directional precision alignment platform is provided and includes an XY-axes moving platform including X-axis moving platform and Y-axis moving platform, the X-axis and Y-axis moving platforms being stacked together, and a ?-angle rotating platform, the ?-angle rotating platform stacked onto the carrier surface thereof; wherein the ?-angle rotating platform is driven to perform precise ?-angle rotation achieving 360° and is of a four-layered thickness only, achieving the goal of having a light and thin product.

Abstract: A xy? precision alignment platform including three power units and three moving platforms is provided. Two of the power units can drive a third moving platform moving in X or Y direction. The other power unit has a worm which can drive an arcuate teeth arrange disposed between the second and third moving platforms to drive the third moving platform rotating. Whereby, since the worm is arranged to drive the arcuate teeth arrange laterally, the alignment platform is thin and the rotative movement of the third moving platform can be precisely controlled. Additionally, each power unit may be electrically connected to a controller for respectively driving and controlling each power unit. When only the rotation of the third moving platform is required, only one of the power units needs to be driven, thus simplifying the operation of the alignment platform and improving the work efficiency.

Abstract: The present invention provides an XY all-directional precision alignment platform comprising: an XY-axes moving platform comprising: X-axis moving platform and Y-axis moving platform; said X-axis and Y-axis moving platforms being stacked together; a ?-angle rotating platform; said ?-angle rotating platform stacked onto said carrier surface thereof; wherein said ?-angle rotating platform is driven to perform precise ?angle rotation achieving 360° and is of a four-layered thickness only, achieving the goal of having a light and thin product.