Abstract: A workpiece processing apparatus allowing independent control of the voltage applied to the shield ring and the workpiece is disclosed. The workpiece processing apparatus includes a platen. The platen includes a dielectric material on which a workpiece is disposed. A bias electrode is disposed beneath the dielectric material. A shield ring, which is constructed from a metal, ceramic, semiconductor or dielectric material, is arranged around the perimeter of the workpiece. A ring electrode is disposed beneath the shield ring. The ring electrode and the bias electrode may be separately powered. This allows the surface voltage of the shield ring to match that of the workpiece, which causes the plasma sheath to be flat. Additionally, the voltage applied to the shield ring may be made different from that of the workpiece to compensate for mismatches in geometries. This improves uniformity of incident angles along the outer edge of the workpiece.

Abstract: The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

Abstract: A method includes providing a substrate, where the substrate has a patterned substrate surface, wherein the patterned substrate surface comprises a first surface region and a second surface region. The method may also include directing a depositing species to the patterned substrate surface; and directing angled ions to the patterned substrate surface, wherein the depositing species forms a deposit on the first surface region and does not form a deposit on the second surface region.

Abstract: The invention comprises a method and apparatus for imaging a tumor of a patient with positively charged particles, comprising the steps of: (1) accelerating the positively charged particles to a relativistic energy using an accelerator; (2) transporting the positively charged particles from the accelerator, through a beam transport system, through an output nozzle of the beam transport system, and through the patient to yield a residual particle beam comprising a residual relativistic velocity; (3) determining the residual relativistic velocity using a first time of flight detector and a second time of flight detector separated by a separation distance; and (4) generating a positively charged particle computed tomography image using the residual relativistic velocity, where individual particles in the residual particle beam comprise a second mass of at least 1.02 times that of a first mass of the individual particles prior to the step of accelerating.

Abstract: The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

Abstract: The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

Abstract: A workpiece processing apparatus allowing independent control of the voltage applied to the shield ring and the workpiece is disclosed. The workpiece processing apparatus includes a platen. The platen includes a dielectric material on which a workpiece is disposed. A bias electrode is disposed beneath the dielectric material. A shield ring, which is constructed from a metal, ceramic, semiconductor or dielectric material, is arranged around the perimeter of the workpiece. A ring electrode is disposed beneath the shield ring. The ring electrode and the bias electrode may be separately powered. This allows the surface voltage of the shield ring to match that of the workpiece, which causes the plasma sheath to be flat. Additionally, the voltage applied to the shield ring may be made different from that of the workpiece to compensate for mismatches in geometries. This improves uniformity of incident angles along the outer edge of the workpiece.

Abstract: A workpiece processing apparatus allowing independent control of the voltage applied to the shield ring and the workpiece is disclosed. The workpiece processing apparatus includes a platen. The platen includes a dielectric material on which a workpiece is disposed. A bias electrode is disposed beneath the dielectric material. A shield ring, which is constructed from a metal, ceramic, semiconductor or dielectric material, is arranged around the perimeter of the workpiece. A ring electrode is disposed beneath the shield ring. The ring electrode and the bias electrode may be separately powered. This allows the surface voltage of the shield ring to match that of the workpiece, which causes the plasma sheath to be flat. Additionally, the voltage applied to the shield ring may be made different from that of the workpiece to compensate for mismatches in geometries. This improves uniformity of incident angles along the outer edge of the workpiece.

Abstract: The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

Abstract: The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

Abstract: A method includes providing a substrate, where the substrate has a patterned substrate surface, wherein the patterned substrate surface comprises a first surface region and a second surface region. The method may also include directing a depositing species to the patterned substrate surface; and directing angled ions to the patterned substrate surface, wherein the depositing species forms a deposit on the first surface region and does not form a deposit on the second surface region.

Abstract: The invention comprises a method and apparatus for imaging a tumor of a patient with positively charged particles, comprising the steps of: (1) accelerating the positively charged particles to a relativistic energy using an accelerator; (2) transporting the positively charged particles from the accelerator, through a beam transport system, through an output nozzle of the beam transport system, and through the patient to yield a residual particle beam comprising a residual relativistic velocity; (3) determining the residual relativistic velocity using a first time of flight detector and a second time of flight detector separated by a separation distance; and (4) generating a positively charged particle computed tomography image using the residual relativistic velocity, where individual particles in the residual particle beam comprise a second mass of at least 1.02 times that of a first mass of the individual particles prior to the step of accelerating.

Abstract: The invention comprises a method and apparatus for using a multi-layer multi-color scintillation based detector element to image a tumor of a patient using a process of determining residual energies of positively charged particles after passing through the patient, the process comprising the steps of: (1) transmitting the positively charged particles at known energies through the patient and into a multi-layer detector element; (2) detecting first and second secondary photons, resultant from passage of the positively charged particles, respectively from a first layer of a first scintillation material and a second layer of a second scintillation material at two respective layer depths, where the first wavelength range differs from the second wavelength range; (4) determining residual energies of the positively charged particles, using output from the step of detecting; and (5) relating the residual energies to body densities to generate an image.

Abstract: A workpiece processing apparatus allowing independent control of the voltage applied to the shield ring and the workpiece is disclosed. The workpiece processing apparatus includes a platen. The platen includes a dielectric material on which a workpiece is disposed. A bias electrode is disposed beneath the dielectric material. A shield ring, which is constructed from a metal, ceramic, semiconductor or dielectric material, is arranged around the perimeter of the workpiece. A ring electrode is disposed beneath the shield ring. The ring electrode and the bias electrode may be separately powered. This allows the surface voltage of the shield ring to match that of the workpiece, which causes the plasma sheath to be flat. Additionally, the voltage applied to the shield ring may be made different from that of the workpiece to compensate for mismatches in geometries. This improves uniformity of incident angles along the outer edge of the workpiece.