Patents by Inventor Maurice Anton Jaques Teuwen

Maurice Anton Jaques Teuwen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and method
    Patent number: 7675606
    Abstract: According to one of the aspects of the present invention there is provided a substrate carrier arranged to hold a substrate in position using a vacuum, the vacuum being established in a sealed space created between the substrate carrier and the substrate.
    Type: Grant
    Filed: May 5, 2006
    Date of Patent: March 9, 2010
    Assignee: ASML Netherlands B.V.
    Inventors: Enno Van Den Brink, Henricus Wilhelmus Maria Van Buel, Joseph Consolini, Gerardus Johannes Joseph Keijsers, Klaus Simon, Johannes Theodoor De Smit, Richard Joseph Travers, Maurice Anton Jaques Teuwen, Arnout Johannes Meester, Frederick William Hafner, Vinyu Greenlee, Hubertus Antonius Marinus Baijens
  • Substrate holder and device manufacturing method
    Patent number: 6822730
    Abstract: A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
    Type: Grant
    Filed: July 9, 2003
    Date of Patent: November 23, 2004
    Assignee: ASML Netherlands B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen, Joeri Lof
  • Substrate holder and device manufacturing method
    Publication number: 20040052031
    Abstract: A substrate holder to adapt a small wafer to a wafer table of a lithographic apparatus adapted to receive a larger wafer includes a plate member with a burl pattern on which the small wafer is to be placed, positioning pins to locate the small wafer and a clamp formed by a clamp ring and magnets attached to the plate member.
    Type: Application
    Filed: July 9, 2003
    Publication date: March 18, 2004
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Johannes Wilhelmus Maria Krikhaar, Hubertus Jacobus Maria Van Beijsterveldt, Arthur Winfried Eduardus Minnaert, Maurice Anton Jaques Teuwen, Joeri Lof