Patents by Inventor Maurice Arthur Limpens

Maurice Arthur Limpens has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus, device manufacturing method and radiation collector
    Publication number: 20070084461
    Abstract: A collector is disclosed that is constructed to receive radiation from a radiation source and to transmit radiation to an illumination system, the collector comprising a reflective element which is internally provided with a fluid channel.
    Type: Application
    Filed: June 20, 2006
    Publication date: April 19, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Wilhelmus Box, Harm-Jan Voorma, Olav Frijns, Maurice Arthur Limpens