Patents by Inventor Maurice E. Ewert
Maurice E. Ewert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10903067Abstract: In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.Type: GrantFiled: November 26, 2019Date of Patent: January 26, 2021Assignee: APPLIED MATERIALS, INC.Inventors: Ashish Goel, Anantha Subramani, Maurice E. Ewert
-
Publication number: 20200098559Abstract: In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.Type: ApplicationFiled: November 26, 2019Publication date: March 26, 2020Inventors: Ashish GOEL, Anantha SUBRAMANI, Maurice E. EWERT
-
Patent number: 10504719Abstract: In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the first annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.Type: GrantFiled: March 7, 2013Date of Patent: December 10, 2019Assignee: Applied Materials, Inc.Inventors: Ashish Goel, Anantha Subramani, Maurice E. Ewert
-
Patent number: 9863038Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.Type: GrantFiled: March 14, 2013Date of Patent: January 9, 2018Assignee: APPLIED MATERIALS, INC.Inventors: Maurice E. Ewert, Anantha Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish
-
Patent number: 9818587Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.Type: GrantFiled: March 14, 2013Date of Patent: November 14, 2017Assignee: Applied Materials, Inc.Inventors: Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish
-
Patent number: 8992741Abstract: In a plasma-enhanced physical vapor deposition reactor, uniformity of radial distribution of the deposition rate across the workpiece is enhanced by applying both RF and D.C. power to the target and adjusting the power levels of the RF and D.C. power independently. Further optimization is obtained by adjusting the height of the magnet above the target, adjusting the radius of the orbital motion of the magnet above the target and providing an angle edge surface of the target.Type: GrantFiled: August 8, 2008Date of Patent: March 31, 2015Assignee: Applied Materials, Inc.Inventors: Rongjun Wang, Xianmin Tang, Zhendong Liu, Tza-Jing Gung, Maurice E. Ewert
-
Patent number: 8685215Abstract: A continuously variable multi-position magnetron that is rotated about a central axis in back of a sputtering target at a freely selected radius. The position is dynamically controlled from the outside, for example, through a hydraulic actuator connected between a pivoting arm supporting the magnetron and an arm fixed to the shaft, by two coaxial shafts independent controllable from the outside and supporting the magnetron through a frog-leg mechanism, or a cable connected between the pivoting arms and moved by an external slider. The magnetron can be rotated at two, three, or more discrete radii or be moved in a continuous spiral pattern.Type: GrantFiled: June 4, 2010Date of Patent: April 1, 2014Assignee: Applied Materials, Inc.Inventors: Keith A. Miller, Anantha K. Subramani, Maurice E. Ewert, Tza-Jing Gung, Hong S. Yang, Vincent E. Burkhart
-
Publication number: 20130284096Abstract: In one embodiment, An adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.Type: ApplicationFiled: March 7, 2013Publication date: October 31, 2013Inventors: Ashish GOEL, Anantha SUBRAMANI, Maurice E. EWERT
-
Publication number: 20130270107Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.Type: ApplicationFiled: March 14, 2013Publication date: October 17, 2013Inventors: MAURICE E. EWERT, Anantha K. SUBRAMANI, Umesh M. KELKAR, Chandrasekhar BALASUBRAMANYAM, Joseph M. RANISH
-
Publication number: 20130196514Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.Type: ApplicationFiled: March 14, 2013Publication date: August 1, 2013Applicant: Applied Materials, Inc.Inventors: Maurice E. EWERT, Anantha SUBRAMANI, Umesh M. KELKAR, Chandrasekhar BALASUBRAMANYAM, Joseph M. RANISH
-
Patent number: 8404048Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.Type: GrantFiled: March 11, 2011Date of Patent: March 26, 2013Assignee: Applied Materials, Inc.Inventors: Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish
-
Publication number: 20120231633Abstract: Disclosed are method and apparatus for treating a substrate. The apparatus is a dual-function process chamber that may perform both a material process and a thermal process on a substrate. The chamber has an annular radiant source disposed between a processing location and a transportation location of the chamber. Lift pins have length sufficient to maintain the substrate at the processing location while the substrate support is lowered below the radiant source plane to afford radiant heating of the substrate. A method of processing a substrate having apertures formed in a first surface thereof includes depositing material on the first surface in the apertures and reflowing the material by heating a second surface of the substrate opposite the first surface. A second material can then be deposited, filling the apertures partly or completely. Alternately, a cyclical deposition/reflow process may be performed.Type: ApplicationFiled: March 11, 2011Publication date: September 13, 2012Applicant: APPLIED MATERIALS, INC.Inventors: Maurice E. Ewert, Anantha K. Subramani, Umesh M. Kelkar, Chandrasekhar Balasubramanyam, Joseph M. Ranish
-
Publication number: 20100243440Abstract: A continuously variable multi-position magnetron that is rotated about a central axis in back of a sputtering target at a freely selected radius. The position is dynamically controlled from the outside, for example, through a hydraulic actuator connected between a pivoting arm supporting the magnetron and an arm fixed to the shaft, by two coaxial shafts independent controllable from the outside and supporting the magnetron through a frog-leg mechanism, or a cable connected between the pivoting arms and moved by an external slider. The magnetron can be rotated at two, three, or more discrete radii or be moved in a continuous spiral pattern.Type: ApplicationFiled: June 4, 2010Publication date: September 30, 2010Applicant: APPLIED MATERIALS, INCORPORATEDInventors: Keith A. Miller, Anantha K. Subramani, Maurice E. Ewert, Tza Jing Gung, Hong S. Yang, Vincent E. Burkhart
-
Patent number: 7736473Abstract: A continuously variable multi-position magnetron that is rotated about a central axis in back of a sputtering target at a freely selected radius. The position is dynamically controlled from the outside, for example, through a hydraulic actuator connected between a pivoting arm supporting the magnetron and an arm fixed to the shaft, by two coaxial shafts independent controllable from the outside and supporting the magnetron through a frog-leg mechanism, or a cable connected between the pivoting arms and moved by an external slider. The magnetron can be rotated at two, three, or more discrete radii or be moved in a continuous spiral pattern.Type: GrantFiled: September 14, 2005Date of Patent: June 15, 2010Assignee: Applied Materials, Inc.Inventors: Keith A. Miller, Anantha K. Subramani, Maurice E. Ewert, Tza-Jing Gung, Hong S. Yang, Vincent E. Burkhart
-
Publication number: 20100032289Abstract: In a plasma-enhanced physical vapor deposition reactor, uniformity of radial distribution of the deposition rate across the workpiece is enhanced by applying both RF and D.C. power to the target and adjusting the power levels of the RF and D.C. power independently. Further optimization is obtained by adjusting the height of the magnet above the target, adjusting the radius of the orbital motion of the magnet above the target and providing an angle edge surface of the target.Type: ApplicationFiled: August 8, 2008Publication date: February 11, 2010Applicant: Applied Materials, Inc.Inventors: RONGJUN WANG, Xianmin Tang, Zhendong Liu, Tza-Jing Gung, Maurice E. Ewert
-
Publication number: 20090308739Abstract: Embodiments described herein generally relate to an apparatus and method for uniform sputter depositing of materials into the bottom and sidewalls of high aspect ratio features on a substrate. In one embodiment, a collimator for mechanical and electrical coupling with a shield member positioned between a sputtering target and a substrate support pedestal is provided. The collimator comprises a central region and a peripheral region, wherein the collimator has a plurality of apertures extending therethrough and where the apertures located in the central region have a higher aspect ratio than the apertures located in the peripheral region.Type: ApplicationFiled: June 11, 2009Publication date: December 17, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Martin Lee Riker, Maurice E. Ewert, Anantha K. Subramani
-
Publication number: 20090308732Abstract: Embodiments of the present invention generally relate to an apparatus and method for uniform sputter depositing of materials into the bottom and sidewalls of high aspect ratio features on a substrate. In one embodiment, a sputter deposition system includes a collimator that has apertures having aspect ratios that decrease from a central region of the collimator to a peripheral region of the collimator. In one embodiment, the collimator is coupled to a grounded shield via a bracket member that includes a combination of internally and externally threaded fasteners. In another embodiment, the collimator is integrally attached to a grounded shield. In one embodiment, a method of sputter depositing material includes pulsing the bias on the substrate support between high and low values.Type: ApplicationFiled: June 11, 2009Publication date: December 17, 2009Applicant: APPLIED MATERIALS, INC.Inventors: Yong Cao, Maurice E. Ewert, Xianmin Tang, Keith A. Miller, Daniel C. Lubben, Umesh M. Kelkar, Tza-Jing Gung, Anantha K. Subramani
-
Patent number: 7018515Abstract: A dual-position magnetron that is rotated about a central axis in back of a sputtering target, particularly for sputtering an edge of a target of a barrier material onto a wafer and cleaning material redeposited at a center of the target. During target cleaning, wafer bias is reduced. In one embodiment, an arc-shaped magnetron is supported on a pivot arm pivoting on the end of a bracket fixed to the rotary shaft. A spring biases the pivot arm such that the magnetron is urged towards and overlies the target center. Centrifugal force at increased rotation rate overcomes the spring bias and shift the magnetron to an outer position with the long magnetron dimension aligned with the target edge. Mechanical stops prevent excessive movement in either direction. Other mechanisms include linear slides and actuators.Type: GrantFiled: September 23, 2004Date of Patent: March 28, 2006Assignee: Applied Materials, Inc.Inventors: Tza-Jing Gung, Hong S. Yang, Anantha K. Subramani, Maurice E. Ewert, Keith A. Miller, Vincent E. Burkhart