Patents by Inventor Maurice Wijckmans

Maurice Wijckmans has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographic apparatus and device manufacturing method
    Patent number: 8913228
    Abstract: A lithographic apparatus is disclosed that is arranged to project a pattern from a patterning device onto a substrate, the lithographic apparatus has a substrate table configured to hold a substrate. The substrate table includes a conditioning system configured to hold a conditioning fluid and to condition the substrate table. The conditioning system includes a pressure damper that is in fluid communication with the conditioning system and is arranged to dampen a pressure variation in the conditioning system.
    Type: Grant
    Filed: April 3, 2007
    Date of Patent: December 16, 2014
    Assignee: ASML Netherlands B.V.
    Inventors: Maurice Wijckmans, Martinus Agnes Willem Cuijpers, Martinus Hendrikus Antonius Leenders, Frits Van Der Meulen, Joost Jeroen Ottens, Theodorus Petrus Maria Cadee, Frederik Eduard De Jong, Wilhelmus Franciscus Johannes Simons, Edwin Augustinus Matheus Van Gompel, Martin Frans Pierre Smeets, Rob Jansen, Gerardus Adrianus Antonius Maria Kusters, Martijn Van Baren
  • Optical Assembly Structure Comprising a Connecting Body with Thermal Expansion Compensations Means
    Publication number: 20080193201
    Abstract: An optical assembly comprises a connecting body (1) consisting of at least a first and a second part (3, 4), the body (1) being connected to an assembly means (2) of a ceramic material wherein the assembly means (2) consists of at least a first and a second part (17, 18) separated by a gap (19).
    Type: Application
    Filed: August 22, 2004
    Publication date: August 14, 2008
    Applicant: CARL ZEISS SMT AG
    Inventors: Yim-Bun Patrick Kwan, Stefan Xalter, Fraser Morrison, Maurice Wijckmans, David Kendall
  • Lithographic apparatus and device manufacturing method
    Publication number: 20080074629
    Abstract: A lithographic apparatus is disclosed that includes a support constructed to support a patterning device, the patterning device being capable of imparting a radiation beam with a pattern in its cross-section to form a patterned radiation beam and a substrate table constructed to hold a substrate. Further, the lithographic apparatus includes a projection system configured to project the patterned radiation beam onto a target portion of the substrate, the projection system being mounted to a reference element of the lithographic apparatus by a resilient mount to reduce a transfer of high frequency vibration from the reference element to the projection system and a control system to counteract a position error of the substrate table and the support relative to the projection system.
    Type: Application
    Filed: September 27, 2006
    Publication date: March 27, 2008
    Applicant: ASML Netherlands B.V.
    Inventors: Rogier Herman Mathijs Groeneveld, Antonius Johannes Josephus Van Dijsseldonk, Dominicus Jacobus Petrus Adrianus Franken, Bastiaan Stephanus Hendricus Jansen, Robertus Johannes Marinus De Jongh, Marc Wilhelmus Maria Van Der Wijst, Maurice Wijckmans
  • Lithographic apparatus and device manufacturing method
    Publication number: 20070242245
    Abstract: A lithographic apparatus is disclosed that is arranged to project a pattern from a patterning device onto a substrate, the lithographic apparatus has a substrate table configured to hold a substrate. The substrate table includes a conditioning system configured to hold a conditioning fluid and to condition the substrate table. The conditioning system includes a pressure damper that is in fluid communication with the conditioning system and is arranged to dampen a pressure variation in the conditioning system.
    Type: Application
    Filed: April 3, 2007
    Publication date: October 18, 2007
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Maurice Wijckmans, Martinus Agnes Cuijpers, Martinus Hendrikus Leenders, Frits Van Der Meulen, Joost Ottens, Theodorus Cadee, Frederik De Jong, Wilhelmus Franciscus Simons, Edwin Augustinus Van Gompel, Martin Smeets, Rob Jansen, Gerardus Adrianus Kusters, Martijn Van Baren