Patents by Inventor Maurice Wilhelmus Leonardus Hendric FEIJTS

Maurice Wilhelmus Leonardus Hendric FEIJTS has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE HOLDER, LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD, AND METHOD OF MANUFACTURING A SUBSTRATE HOLDER
    Publication number: 20120212725
    Abstract: A substrate holder for a lithographic apparatus has a planarization layer provided on a surface thereof. The planarization layer provides a smooth surface for the formation of a thin film stack forming an electronic component. The thin film stack comprises an (optional) isolation layer, a metal layer forming an electrode, a sensor, a heater, a transistor or a logic device, and a top isolation layer.
    Type: Application
    Filed: February 16, 2012
    Publication date: August 23, 2012
    Applicant: ASML NETHERLANDS B.V.
    Inventors: Raymond Wilhelmus Louis LAFARRE, Nicolaas TEN KATE, Nina Vladimirovna DZIOMKlNA, Yogesh Pramod KARADE, Siegfried Alexander TROMP, Jacobus Josephus LEIJSSEN, Elisabeth Corinne RODENBURG, Maurice Wilhelmus Leonardus Hendric FEIJTS, Hendrik HUISMAN