Abstract: A hydrogen fluoride supply unit which comprises a plurality of transportable hydrogen fluoride storage containers connected to a hydrogen fluoride supply line and a chemical plant comprising the hydrogen fluoride supply unit. Such chemical plant may be for the manufacture of fluorine, wherein the hydrogen fluoride supply line is connected to an electrolysis cell for producing fluorine by HF electrolysis of a molten salt electrolyte. A process for the manufacture of a chemical comprising using such chemical plant. Also a method for supply of hydrogen fluoride to a chemical plant, which comprises: (a) filling at least one transportable hydrogen fluoride storage container with hydrogen fluoride, (b) transporting the hydrogen fluoride storage container to the hydrogen fluoride supply unit, (c) connecting the hydrogen fluoride storage container to the hydrogen fluoride supply line, and (d) supplying hydrogen fluoride from the hydrogen fluoride storage container to the hydrogen fluoride supply line.

Abstract: Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process wherein the contamination of the elemental fluorine with gaseous impurities, such as air or moisture, is prevented by producing it on site and delivering it to the point of use under a pressure higher than ambient pressure.

Abstract: Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).

Abstract: A hydrogen fluoride supply unit which comprises a plurality of transportable hydrogen fluoride storage containers connected to a hydrogen fluoride supply line and a chemical plant comprising the hydrogen fluoride supply unit. Such chemical plant may be for the manufacture of fluorine, wherein the hydrogen fluoride supply line is connected to an electrolysis cell for producing fluorine by HF electrolysis of a molten salt electrolyte. A process for the manufacture of a chemical comprising using such chemical plant. Also a method for supply of hydrogen fluoride to a chemical plant, which comprises: (a) filling at least one transportable hydrogen fluoride storage container with hydrogen fluoride, (b) transporting the hydrogen fluoride storage container to the hydrogen fluoride supply unit, (c) connecting the hydrogen fluoride storage container to the hydrogen fluoride supply line, and (d) supplying hydrogen fluoride from the hydrogen fluoride storage container to the hydrogen fluoride supply line.

Abstract: A fluorine gas manufacturing plant wherein F2 is manufactured by the electrolysis of KF/HF compositions. The plant comprises skid modules for: HF storage, the electrolytic cells, storage and purification of the manufactured F2 raw gas, for fluorine gas delivery including a single buffer tank or multiple storage units, scrubbers to provide purified waste gas, for providing cooling water circuits, analysis, electrical rectifiers, an electrical sub-station with transformers and emergency supply, and for utilities including a control room with laboratory and a rest room for the personnel. The advantage of the skids is that they can be separately manufactured in workshops, tested, transported to the facility and assembled there. A great advantage is the safety aspect, a reliable F2 production for 24 hours and 7 days a week of high purity F2.

Abstract: Process for manufacturing dichloropropanol according to which, a) in a liquid reaction medium containing water, which is in contact with a gaseous phase, glycerol is reacted with hydrogen chloride under a partial pressure of hydrogen chloride in the gaseous phase greater than 0.

Abstract: Elemental fluorine is often manufactured electrochemically from a solution of KF in hydrogen fluoride and contains varying amounts of entrained electrolyte salt in solid form as impurity. The invention concerns a process for the purification of such impure elemental fluorine by contact with liquid hydrogen fluoride, e.g., in a jet gas scrubber or by bubbling the raw fluorine through liquid hydrogen fluoride. After this purification step, any entrained hydrogen fluoride is removed by adsorption, condensing it out or both. After passing through a filter with very small pores, the purified fluorine is especially suited for the semiconductor industry as etching gas or as chamber cleaning gas in the manufacture of semiconductors, TFTs and solar cells, or for the manufacture of micro-electromechanical systems (“MEMS”).

Abstract: Elemental fluorine is used as etching agent for the manufacture of electronic devices, especially semiconductor devices, micro-electromechanical devices, thin film transistors, flat panel displays and solar panels, and as chamber cleaning agent mainly for plasma-enhanced vapor deposition (PECVD) apparatus. For this purpose, fluorine often is produced on-site. The invention provides a process wherein the contamination of the elemental fluorine with gaseous impurities, such as air or moisture, is prevented by producing it on site and delivering it to the point of use under a pressure higher than ambient pressure.

Abstract: Process for manufacturing dichloropropanol according to which, a) in a liquid reaction medium containing water, which is in contact with a gaseous phase, glycerol is reacted with hydrogen chloride under a partial pressure of hydrogen chloride in the gaseous phase greater than 0.

Abstract: Process for preparing peroxidic perfluoropolyethers by oxidation of tetrafluoroethylene with oxygen, in liquid phase comprising a solvent and in the presence of a chemical initiator, at a pressure between 2 and 15 absolute atm and operating with a molar ratio of the tetrafluoroethylene to the chemical initiator higher than 35. The process allows to increase the molecular weight of the perfluoropolyethers at the same content of peroxidic oxygen.