Patents by Inventor Mauro Diodà

Mauro Diodà has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Patent number: 11346016
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: May 31, 2022
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Publication number: 20220145490
    Abstract: Methods for preparing an ingot in an ingot puller apparatus are disclosed. Thermal simulations are performed with the length of the ingot puller apparatus side heater being varied in the thermal simulations. A side heater is selected based on the thermal simulations. An ingot puller apparatus having the selected side heater length is provided. A seed crystal is lowered into a melt within a crucible of the ingot puller apparatus and an ingot is withdrawn from the melt.
    Type: Application
    Filed: November 12, 2020
    Publication date: May 12, 2022
    Inventors: Maria Porrini, Sergio Morelli, Mauro Diodà
  • Publication number: 20220136129
    Abstract: Crystal pulling systems having a fluid-cooled exhaust tube are disclosed. The fluid-cooled exhaust tube extends through the reactor housing and into the reaction chamber. In some embodiments, the exhaust tube extends through the bottom of the crystal puller housing and through a bottom heat shield within the ingot puller housing.
    Type: Application
    Filed: October 7, 2021
    Publication date: May 5, 2022
    Inventors: Stephan Haringer, Marco Zardoni, Mauro Dioda, Hariprasad Sreedharamurthy
  • Patent number: 11085127
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Grant
    Filed: December 28, 2018
    Date of Patent: August 10, 2021
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Publication number: 20200199772
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Application
    Filed: December 28, 2018
    Publication date: June 25, 2020
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Patent number: 10443148
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Grant
    Filed: March 10, 2016
    Date of Patent: October 15, 2019
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Patent number: 10378121
    Abstract: A crystal pulling system for growing a monocrystalline ingot from a melt of semiconductor or solar-grade material includes a housing defining a growth chamber, a crucible disposed within the growth chamber containing the melt of semiconductor or solar-grade material, a vacuum pump for drawing exhaust gases out of the growth chamber, and a fluid-cooled exhaust tube connected between the growth chamber and the vacuum pump.
    Type: Grant
    Filed: November 22, 2016
    Date of Patent: August 13, 2019
    Assignee: GlobalWafers Co., Ltd.
    Inventors: Mauro Diodà, Marco D'Angella, Hariprasad Sreedharamurthy
  • Publication number: 20190136405
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Application
    Filed: December 28, 2018
    Publication date: May 9, 2019
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Publication number: 20190136406
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Application
    Filed: December 28, 2018
    Publication date: May 9, 2019
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Patent number: 10023973
    Abstract: A dopant feeding device for releasing dopant into a feeder system during doping of a crystal growing system includes a dopant container for holding the dopant, a lower valve, and an upper valve. The dopant container includes a wall defining a lower opening for releasing the dopant therethrough. The lower valve is positioned adjacent to the lower opening and is movable between a closed position that is in contact with the wall to prevent passage of dopant through the lower opening and an open position that is spaced from the lower opening to allow passage of dopant therethrough. The upper valve is positioned above and connected to the lower valve. The upper valve is disposed within the dopant container and is movable between a first position that is spaced from the dopant container and a second position that is in contact with the dopant container.
    Type: Grant
    Filed: June 7, 2013
    Date of Patent: July 17, 2018
    Assignee: MEMC Electronic Materials S.P.A.
    Inventors: Gianni Dell'Amico, Ugo Delpero, Mauro Diodà, Stephan Haringer
  • Publication number: 20180044814
    Abstract: A method of growing a doped monocrystalline ingot using a crystal growing system is provided. The crystal growing system includes a growth chamber, a dopant feeding device, and a feed tube. The method includes preparing a melt of semiconductor or solar-grade material in a crucible disposed within the growth chamber, introducing a solid dopant into the feed tube with the dopant feeding device, melting the solid dopant within the feed tube to a form a liquid dopant, introducing the liquid dopant into the melt below a surface of the melt, and growing a monocrystalline ingot from the melt by contacting the melt with a seed crystal and pulling the seed crystal away from the melt.
    Type: Application
    Filed: March 10, 2016
    Publication date: February 15, 2018
    Inventors: Stephan Haringer, Marco D'Angella, Mauro Diodà
  • Publication number: 20170145587
    Abstract: A crystal pulling system for growing a monocrystalline ingot from a melt of semiconductor or solar-grade material includes a housing defining a growth chamber, a crucible disposed within the growth chamber containing the melt of semiconductor or solar-grade material, a vacuum pump for drawing exhaust gases out of the growth chamber, and a fluid-cooled exhaust tube connected between the growth chamber and the vacuum pump.
    Type: Application
    Filed: November 22, 2016
    Publication date: May 25, 2017
    Inventors: Mauro Diodà, Marco D'Angella, Hariprasad Sreedharamurthy
  • Publication number: 20160298259
    Abstract: A dopant feeding device for releasing dopant into a feeder system during doping of a crystal growing system includes a dopant container for holding the dopant, a lower valve, and an upper valve. The dopant container includes a wall defining a lower opening for releasing the dopant therethrough. The lower valve is positioned adjacent to the lower opening and is movable between a closed position that is in contact with the wall to prevent passage of dopant through the lower opening and an open position that is spaced from the lower opening to allow passage of dopant therethrough. The upper valve is positioned above and connected to the lower valve. The upper valve is disposed within the dopant container and is movable between a first position that is spaced from the dopant container and a second position that is in contact with the dopant container.
    Type: Application
    Filed: June 7, 2013
    Publication date: October 13, 2016
    Inventors: Gianni Dell'Amico, Ugo Delpero, Mauro Diodà, Stephen Haringer
  • Patent number: 5942032
    Abstract: A heat shield assembly is used in a Czochralski crystal puller for selectively shielding a monocrystalline ingot of semiconductor material to control the type and number density of agglomerated defects in the crystal structure of the ingot. The heat shield assembly has an upper heat shield connected to a lower heat shield. The upper and lower heat shields are connected to each other and slidingly connected to an intermediate heat shield. The lower heat shield is able to telescope up into the intermediate heat shield to minimize the profile of the heat shield assembly located within a crystal growth chamber of the crystal puller. However when needed to control formation of the monocrystalline ingot, the lower heat shield may be extended from the intermediate heat shield and project downwardly into the crystal puller crucible in close proximity to an upper surface of molten semiconductor source material in the crucible. A method employing the heat shield assembly is also disclosed.
    Type: Grant
    Filed: August 1, 1997
    Date of Patent: August 24, 1999
    Assignee: MEMC Electronic Materials, Inc.
    Inventors: Kyong-Min Kim, William L. Luter, Lee W. Ferry, Robert J. Braun, Srdjan Ilic, Mauro Dioda, Paolo Tosi, Marco Gobbo, Umberto Martini