Patents by Inventor Mauro Marchi
Mauro Marchi has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 8679887Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: GrantFiled: April 26, 2012Date of Patent: March 25, 2014Assignee: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Publication number: 20120208343Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: ApplicationFiled: April 26, 2012Publication date: August 16, 2012Applicant: STMICROELECTRONICS S.R.L.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Patent number: 8193550Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: GrantFiled: June 10, 2008Date of Patent: June 5, 2012Assignee: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Patent number: 7800234Abstract: A process for manufacturing a through via in a semiconductor device includes the steps of: forming a body having a structural layer, a substrate, and a dielectric layer set between the structural layer and the substrate; insulating a portion of the structural layer to form a front-side interconnection region; insulating a portion of the substrate to form a back-side interconnection region; and connecting the front-side interconnection region and the back-side interconnection region through the dielectric layer.Type: GrantFiled: November 16, 2006Date of Patent: September 21, 2010Assignee: STMicroelectronics S.r.l.Inventors: Mauro Marchi, Marco Ferrera, Caterina Riva
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Patent number: 7595223Abstract: A process for bonding two distinct substrates that integrate microsystems, including the steps of forming micro-integrated devices in at least one of two substrates using micro-electronic processing techniques and bonding the substrates. Bonding is performed by forming on a first substrate bonding regions of deformable material and pressing the substrates one against another so as to deform the bonding regions and to cause them to react chemically with the second substrate. The bonding regions are preferably formed by a thick layer of a material chosen from among aluminum, copper and nickel, covered by a thin layer of a material chosen from between palladium and platinum. Spacing regions ensure exact spacing between the two wafers.Type: GrantFiled: June 21, 2007Date of Patent: September 29, 2009Assignees: STMicroelectronics S.r.l., Hewlett-Packard CompanyInventors: Ubaldo Mastromatteo, Mauro Bombonati, Daniela Morin, Marta Mottura, Mauro Marchi
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Publication number: 20080272447Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: ApplicationFiled: June 10, 2008Publication date: November 6, 2008Applicant: STMICROELECTRONICS S.R.L.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Patent number: 7437933Abstract: Micro-electro-mechanical structure formed by a substrate of semiconductor material and a suspended mass extending above the substrate and separated therefrom by an air gap. An insulating region of a first electrically insulating material extends through the suspended mass and divides it into at least one first electrically insulated suspended region and one second electrically insulated suspended region. A plug element of a second electrically insulating material different from the first electrically insulating material is formed underneath the insulating region and constitutes a barrier between the insulating region and the air gap for preventing removal of the insulating region during fabrication, when an etching agent is used for removing a sacrificial layer and forming the air gap.Type: GrantFiled: July 7, 2005Date of Patent: October 21, 2008Assignee: STMicroelectronics S.r.l.Inventors: Guido Spinola Durante, Simone Sassolini, Marco Ferrera, Mauro Marchi
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Publication number: 20080197512Abstract: A process for manufacturing a through via in a semiconductor device includes the steps of: forming a body having a structural layer, a substrate, and a dielectric layer set between the structural layer and the substrate; insulating a portion of the structural layer to form a front-side interconnection region; insulating a portion of the substrate to form a back-side interconnection region; and connecting the front-side interconnection region and the back-side interconnection region through the dielectric layer.Type: ApplicationFiled: November 16, 2006Publication date: August 21, 2008Applicant: STMicroelectronics S.r.l.Inventors: Mauro Marchi, Marco Ferrera, Caterina Riva
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Patent number: 7399652Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: GrantFiled: April 8, 2004Date of Patent: July 15, 2008Assignee: STMicroelectronics S.R.L.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Publication number: 20070254454Abstract: A process for bonding two distinct substrates that integrate microsystems, including the steps of forming micro-integrated devices in at least one of two substrates using micro-electronic processing techniques and bonding the substrates. Bonding is performed by forming on a first substrate bonding regions of deformable material and pressing the substrates one against another so as to deform the bonding regions and to cause them to react chemically with the second substrate. The bonding regions are preferably formed by a thick layer of a material chosen from among aluminum, copper and nickel, covered by a thin layer of a material chosen from between palladium and platinum. Spacing regions ensure exact spacing between the two wafers.Type: ApplicationFiled: June 21, 2007Publication date: November 1, 2007Applicant: STMICROELECTRONICS S.R.L.Inventors: Ubaldo Mastromatteo, Mauro Bombonati, Daniela Morin, Marta Mottura, Mauro Marchi
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Patent number: 7270003Abstract: The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.Type: GrantFiled: July 25, 2005Date of Patent: September 18, 2007Assignee: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Marco Del Sarto, Lorenzo Baldo, Mauro Marchi
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Patent number: 7116525Abstract: A read/write assembly for magnetic hard disks includes at least: one supporting element; one read/write (R/W) transducer; one micro-actuator, set between the R/W transducer and the supporting element; one electrical-connection structure for connection to a remote device carried by the supporting element and connected to the R/W transducer and to the micro-actuator. In addition, a protective structure, set so as to cover the micro-actuator is made of a single piece with the electrical-connection structure.Type: GrantFiled: May 2, 2003Date of Patent: October 3, 2006Assignee: STMicroelectronics S.R.L.Inventors: Marco Del Sarto, Mauro Marchi, Lorenzo Baldo, Simone Sassolini
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Publication number: 20060070441Abstract: Micro-electro-mechanical structure formed by a substrate of semiconductor material and a suspended mass extending above the substrate and separated therefrom by an air gap. An insulating region of a first electrically insulating material extends through the suspended mass and divides it into at least one first electrically insulated suspended region and one second electrically insulated suspended region. A plug element of a second electrically insulating material different from the first electrically insulating material is formed underneath the insulating region and constitutes a barrier between the insulating region and the air gap for preventing removal of the insulating region during fabrication, when an etching agent is used for removing a sacrificial layer and forming the air gap.Type: ApplicationFiled: July 7, 2005Publication date: April 6, 2006Applicant: STMicroelectronics S.r.I.Inventors: Guido Durante, Simone Sassolini, Marco Ferrera, Mauro Marchi
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Publication number: 20060042385Abstract: The semiconductor inertial sensor is formed by a rotor element and a stator element electrostatically coupled together. The rotor element is formed by a suspended mass and by a plurality of mobile electrodes extending from the suspended mass. The stator element is formed by a plurality of fixed electrodes facing respective mobile electrodes. The suspended mass is supported by elastic suspension elements. The suspended mass has a first, larger, thickness, and the elastic suspension elements have a second thickness, smaller than the first thickness.Type: ApplicationFiled: July 25, 2005Publication date: March 2, 2006Applicant: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Marco Del Sarto, Lorenzo Baldo, Mauro Marchi
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Publication number: 20040256686Abstract: A method for manufacturing a micro-electro-mechanical device, which has supporting parts and operative parts, includes providing a first semiconductor wafer, having a first layer of semiconductor material and a second layer of semiconductor material arranged on top of the first layer, forming first supporting parts and first operative parts of the device in the second layer, forming temporary anchors in the first layer, and bonding the first wafer to a second wafer, with the second layer facing the second wafer. After bonding the first wafer and the second wafer together, second supporting parts and second operative parts of said device are formed in the first layer. The temporary anchors are removed from the first layer to free the operative parts formed therein.Type: ApplicationFiled: April 8, 2004Publication date: December 23, 2004Applicant: STMicroelectronics S.r.l.Inventors: Simone Sassolini, Mauro Marchi, Marco Del Sarto, Lorenzo Baldo
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Publication number: 20030235013Abstract: A read/write assembly for magnetic hard disks includes at least: one supporting element; one read/write (R/W) transducer; one micro-actuator, set between the R/W transducer and the supporting element; one electrical-connection structure for connection to a remote device carried by the supporting element and connected to the R/W transducer and to the micro-actuator. In addition, a protective structure, set so as to cover the micro-actuator is made of a single piece with the electrical-connection structure.Type: ApplicationFiled: May 2, 2003Publication date: December 25, 2003Applicant: STMicroelectronics S.r.I.Inventors: Marco Del Sarto, Mauro Marchi, Lorenzo Baldo, Simone Sassolini
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Publication number: 20030109183Abstract: A process for bonding two distinct substrates that integrate microsystems, including the steps of forming micro-integrated devices in at least one of two substrates using micro-electronic processing techniques and bonding the substrates. Bonding is performed by forming on a first substrate bonding regions of deformable material and pressing the substrates one against another so as to deform the bonding regions and to cause them to react chemically with the second substrate. The bonding regions are preferably formed by a thick layer of a material chosen from among aluminum, copper and nickel, covered by a thin layer of a material chosen from between palladium and platinum. Spacing regions ensure exact spacing between the two wafers.Type: ApplicationFiled: September 12, 2002Publication date: June 12, 2003Applicants: STMicroelectronics S.r.I., Hewlett-Packard CompanyInventors: Ubaldo Mastromatteo, Mauro Bombonati, Daniela Morin, Marta Mottura, Mauro Marchi