Patents by Inventor Maw R. Chin

Maw R. Chin has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Conductive plug for contacts and vias on integrated circuits
    Patent number: 4837051
    Abstract: A process is disclosed for filling contact or via openings in an integrated circuit with electrically conductive plugs. The process includes the steps of (a) forming one or more openings in an planarized oxide layer, where the one or more openings is disposed over and exposes semi-insulating or conductive regions, and (b) filling the one or more openings with conductive material to substantially the same level as the adjacent surfaces of the oxide layer to form respective planarized conductive plugs.
    Type: Grant
    Filed: July 21, 1988
    Date of Patent: June 6, 1989
    Assignee: Hughes Aircraft Company
    Inventors: Joseph E. Farb, Maw R. Chin