Patents by Inventor Maw Tun

Maw Tun has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Multi-piece baffle plate assembly for a plasma processing system
    Publication number: 20050241767
    Abstract: A plasma processing system includes at least one multi-piece baffle plate. The multi-piece baffle plate assembly generally comprises at least one annular shaped ring portion having an opening and an insert portion dimensioned to sit within the opening. The individual pieces can be formed of a ceramic material. The effects caused by thermal gradients in the plate during plasma processing are minimized.
    Type: Application
    Filed: April 30, 2004
    Publication date: November 3, 2005
    Inventors: David Ferris, Aseem Srivastava, Maw Tun