Abstract: A system and method is disclosed for correcting gain and offset errors in a signal amplifier for a position sensitive detector. The present invention eliminates the need to perform division for normalization by holding constant a signal proportional to the sum of the two signals generated by the position sensitive detector. First the two signals generated by the position sensitive detector are pulse-width modulated with a common variable duty cycle clock, and then the resulting modulated signals are low-pass filtered to extract the DC component. The duty cycle is varied so that the sum of the two DC components is held constant. In the preferred embodiment, the means for varying the duty cycle are closed-loop feedback and open-loop feed forward. The closed-loop feedback gives long term accuracy and the open-loop feed forward gives rapid settling time.

Abstract: An r.f. excited vacuum plasma processor has a workpiece held in place by a monopolar or bipolar electrostatic chuck having an electrode that develops peak r.f. voltages over a wide amplitude range. A chuck DC power supply source is connected to the chuck. An r.f. peak detecting circuit coupled with the electrode is part of a circuit for controlling the DC voltage applied by the chuck power supply to the chuck. The control circuit supplies an unamplified replica of a DC voltage derived by the peak detecting circuit to the chuck DC power supply source via a DC circuit including only passive elements so the level of the DC voltage applied to the chuck varies in response to variations in the peak amplitude of the r.f. voltage. The peak detector includes at least several series connected diodes having electrodes polarized in the same direction or two stacks of series connected diodes.