Patents by Inventor Max H. Walters

Max H. Walters has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Fluoride additive containing chemical mechanical polishing slurry and method for use of same
    Patent number: 5993686
    Abstract: A chemical mechanical polishing slurry comprising an oxidizing agent, a fluoride containing additive and an abrasive and a method for using the fluoride containing additive chemical mechanical polishing slurry to remove tungsten and titanium from substrates.
    Type: Grant
    Filed: June 6, 1996
    Date of Patent: November 30, 1999
    Assignee: Cabot Corporation
    Inventors: Christopher C. Streinz, Brian L. Mueller, Michael A. Lucarelli, Max H. Walters