Patents by Inventor Max KOOLE

Max KOOLE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • IN-SITU CLEANING FOR LITHOGRAPHIC APPARATUS
    Publication number: 20260186429
    Abstract: A photoelectric plate (300) for use in place of a patterning device in a lithographic apparatus, the photoelectric plate comprising: a base layer (301); and a coating (302) provided on the base layer; wherein the coating is configured to convert impinging photons of EUV radiation into free electrons at a higher conversion efficiency than the base layer.
    Type: Application
    Filed: December 15, 2023
    Publication date: July 2, 2026
    Applicant: ASML Netherlands B.V.
    Inventors: Max KOOLE, Andrey NIKIPELOV, Vladimir KVON
  • Switching device, deposition device comprising the switching device, method for switching a fluid flow, and method for depositing particles onto a substrate
    Patent number: 12350700
    Abstract: A switching device is provided for switching the flow of a fluid. The switching device includes a fluid conduit including a first inlet for said fluid and a first outlet, a first switching fluid conduit including a second inlet for a switching fluid, the first switching fluid conduit being in fluid connection with the fluid conduit at a first position between the first inlet and the first outlet, an exhaust conduit including a second outlet, the exhaust conduit being in fluid connection with the fluid conduit at a second position between the first inlet and the first position, and a control device. The switching device further includes a second switching fluid conduit in fluid connection with the exhaust conduit and the first switching fluid conduit. The control device controls the flow of the switching fluid into the first switching fluid conduit and/or the second switching fluid conduit.
    Type: Grant
    Filed: January 16, 2020
    Date of Patent: July 8, 2025
    Assignee: VSPARTICLE HOLDING B.V.
    Inventors: Katharina Weber, Max Koole, Tobias Vincent Pfeiffer
  • SWITCHING DEVICE, DEPOSITION DEVICE COMPRISING THE SWITCHING DEVICE, METHOD FOR SWITCHING A FLUID FLOW, AND METHOD FOR DEPOSITING PARTICLES ONTO A SUBSTRATE
    Publication number: 20220097086
    Abstract: A switching device is provided for switching the flow of a fluid. The switching device includes a fluid conduit including a first inlet for said fluid and a first outlet, a first switching fluid conduit including a second inlet for a switching fluid, the first switching fluid conduit being in fluid connection with the fluid conduit at a first position between the first inlet and the first outlet, an exhaust conduit including a second outlet, the exhaust conduit being in fluid connection with the fluid conduit at a second position between the first inlet and the first position, and a control device. The switching device further includes a second switching fluid conduit in fluid connection with the exhaust conduit and the first switching fluid conduit. The control device controls the flow of the switching fluid into the first switching fluid conduit and/or the second switching fluid conduit.
    Type: Application
    Filed: January 16, 2020
    Publication date: March 31, 2022
    Inventors: Katharina WEBER, Max KOOLE, Tobias Vincent PFEIFFER