Patents by Inventor Max Scheffer-Czygan

Max Scheffer-Czygan has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220028682
    Abstract: A gallium arsenide substrate which exhibits at least one surface having a surface oxide layer comprising gallium and arsenic oxides and which exhibits at least one surface having, according to an ellipsometric lateral substrate mapping with an optical surface analyzer, based on a substrate diameter of 150 mm as reference, a defect number of <6000 and/or a total defect area of less than 2 cm2, wherein a defect is defined as a continuous area of greater than 1000 ?m2 having a deviation from the average measurement signal in elipsometric lateral substrate mapping with an optical surface analyzer of at least ±0.05%.
    Type: Application
    Filed: October 10, 2021
    Publication date: January 27, 2022
    Inventors: Wolfram FLIEGEL, Christoph KLEMENT, Christa WILLNAUER, Max SCHEFFER-CZYGAN, André KLEINWECHTER, Stefan EICHLER, Berndt WEINERT, Michael MÄDER
  • Patent number: 11170989
    Abstract: The present invention relates to a novel provided gallium arsenide substrates as well as the use thereof. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, by way of example by means of ellipsometric lateral substrate mapping for optical contact-free quantitative characterization.
    Type: Grant
    Filed: February 1, 2018
    Date of Patent: November 9, 2021
    Assignee: FREIBERGER COMPOUND MATERIALS GMBH
    Inventors: Wolfram Fliegel, Christoph Klement, Christa Willnauer, Max Scheffer-Czygan, André Kleinwechter, Stefan Eichler, Berndt Weinert, Michael Mäder
  • Patent number: 10460924
    Abstract: The present invention relates to a novel process for producing a surface-treated gallium arsenide substrate as well as novel provided gallium arsenide substrates as such as well as the use thereof. The improvement of the process according to the invention is based on a particular final surface treatment with an oxidation treatment of at least one surface of the gallium arsenide substrate in dry condition by means of UV radiation and/or ozone gas, a contacting of the at least one surface of the gallium arsenide substrate with at least one liquid medium and a Marangoni drying of the gallium arsenide substrate. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, specifically by means of ellipsometric lateral substrate mapping for the optical contact-free quantitative characterization.
    Type: Grant
    Filed: February 12, 2014
    Date of Patent: October 29, 2019
    Assignee: FREIBERGER COMPOUND MATERIALS GMBH
    Inventors: Wolfram Fliegel, Christoph Klement, Christa Willnauer, Max Scheffer-Czygan, André Kleinwechter, Stefan Eichler, Berndt Weinert, Michael Mäder
  • Publication number: 20180158673
    Abstract: The present invention relates to a novel provided gallium arsenide substrates as well as the use thereof. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, by way of example by means of ellipsometric lateral substrate mapping for optical contact-free quantitative characterization.
    Type: Application
    Filed: February 1, 2018
    Publication date: June 7, 2018
    Inventors: Wolfram FLIEGEL, Christoph KLEMENT, Christa WILLNAUER, Max SCHEFFER-CZYGAN, André KLEINWECHTER, Stefan EICHLER, Berndt WEINERT, Michael MÄDER
  • Patent number: 9368585
    Abstract: An arrangement for manufacturing a crystal of the melt of a raw material comprises: a furnace having a heating device with one or more heating elements, which are configured to generate a gradient temperature field directed along a first direction, a plurality of crucibles for receiving the melt, which are arranged within the gradient temperature field side by side, and a device for homogenizing the temperature field within a plane perpendicular to the first direction in the at least two crucibles. The arrangement further has a filling material inserted within a space between the crucibles wherein the filling shows an anisotropic heat conductivity. Additionally or alternatively, the arrangement may comprise a device for generating magnetic migration fields, both the filling material having the anisotropic heat conductivity and the device for generating magnetic migration fields being suited to compensate or prevent the formation of asymmetric phase interfaces upon freezing of the raw melt.
    Type: Grant
    Filed: December 20, 2013
    Date of Patent: June 14, 2016
    Assignee: FREIBERGER COMPOUND MATERIALS GMBH
    Inventors: Stefan Eichler, Thomas Bünger, Michael Butter, Rico Rühmann, Max Scheffer-Czygan
  • Publication number: 20150371844
    Abstract: The present invention relates to a novel process for producing a surface-treated gallium arsenide substrate as well as novel provided gallium arsenide substrates as such as well as the use thereof. The improvement of the process according to the invention is based on a particular final surface treatment with an oxidation treatment of at least one surface of the gallium arsenide substrate in dry condition by means of UV radiation and/or ozone gas, a contacting of the at least one surface of the gallium arsenide substrate with at least one liquid medium and a Marangoni drying of the gallium arsenide substrate. The gallium arsenide substrates provided according to the invention exhibit a so far not obtained surface quality, in particular a homogeneity of surface properties, which is detectable by means of optical surface analyzers, specifically by means of ellipsometric lateral substrate mapping for the optical contact-free quantitative characterization.
    Type: Application
    Filed: February 12, 2014
    Publication date: December 24, 2015
    Inventors: Wolfram FLIEGEL, Christoph KLEMENT, Christa WILLNAUER, Max SCHEFFER-CZYGAN, André KLEINWECHTER, Stefan EICHLER, Berndt WEINERT, Michael MÄDER
  • Publication number: 20140103493
    Abstract: An arrangement for manufacturing a crystal of the melt of a raw material comprises: a furnace having a heating device with one or more heating elements, which are configured to generate a gradient temperature field directed along a first direction, a plurality of crucibles for receiving the melt, which are arranged within the gradient temperature field side by side, and a device for homogenizing the temperature field within a plane perpendicular to the first direction in the at least two crucibles. The arrangement further has a filling material inserted within a space between the crucibles wherein the filling shows an anisotropic heat conductivity. Additionally or alternatively, the arrangement may comprise a device for generating magnetic migration fields, both the filling material having the anisotropic heat conductivity and the device for generating magnetic migration fields being suited to compensate or prevent the formation of asymmetric phase interfaces upon freezing of the raw melt.
    Type: Application
    Filed: December 20, 2013
    Publication date: April 17, 2014
    Applicant: FREIBERGER COMPOUND MATERIALS GMBH
    Inventors: Stefan EICHLER, Thomas BÜNGER, Michael BUTTER, Rico RÜHMANN, Max SCHEFFER-CZYGAN
  • Patent number: 8652253
    Abstract: An arrangement for manufacturing a crystal of the melt of a raw material comprises: a furnace having a heating device with one or more heating elements, which are configured to generate a gradient temperature field directed along a first direction, a plurality of crucibles for receiving the melt, which are arranged within the gradient temperature field side by side, and a device for homogenizing the temperature field within a plane perpendicular to the first direction in the at least two crucibles. The arrangement further has a filling material inserted within a space between the crucibles wherein the filling shows an anisotropic heat conductivity. Additionally or alternatively, the arrangement may comprise a device for generating magnetic migration fields, both the filling material having the anisotropic heat conductivity and the device for generating magnetic migration fields being suited to compensate or prevent the formation of asymmetric phase interfaces upon freezing of the raw melt.
    Type: Grant
    Filed: June 5, 2008
    Date of Patent: February 18, 2014
    Assignee: Freiberger Compound Materials GmbH
    Inventors: Stefan Eichler, Thomas Bünger, Michael Butter, Rico Rühmann, Max Scheffer-Czygan
  • Publication number: 20080311417
    Abstract: An arrangement for manufacturing a crystal of the melt of a raw material comprises: a furnace having a heating device with one or more heating elements, which are configured to generate a gradient temperature field directed along a first direction, a plurality of crucibles for receiving the melt, which are arranged within the gradient temperature field side by side, and a device for homogenizing the temperature field within a plane perpendicular to the first direction in the at least two crucibles. The arrangement further has a filling material inserted within a space between the crucibles wherein the filling shows an anisotropic heat conductivity. Additionally or alternatively, the arrangement may comprise a device for generating magnetic migration fields, both the filling material having the anisotropic heat conductivity and the device for generating magnetic migration fields being suited to compensate or prevent the formation of asymmetric phase interfaces upon freezing of the raw melt.
    Type: Application
    Filed: June 5, 2008
    Publication date: December 18, 2008
    Inventors: Stefan Eichler, Thomas Bunger, Michael Butter, Rico Ruhmann, Max Scheffer-Czygan