Patents by Inventor Max Sha

Max Sha has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • System and process for CU-CMP wastewater treatment
    Patent number: 6818131
    Abstract: A system for the treatment of CMP wastewater, including wastewater from a copper CMP process. The wastewater treatment system includes a coagulant supply tank from which an FSC polymer coagulant is directed into a reaction tank that separately receives the untreated wastewater. The coagulant may be mixed with the untreated wastewater in selected ratios to provide a desired dosing quantity of the coagulant in the reaction tank. As the wastewater and the FSC polymer coagulant are mixed in the reaction tank, the coagulant flocs the slurry chemicals in the wastewater and removes the chemicals from solution in the wastewater as a precipitate before the wastewater is directed to a clarifier. The clarifier separates the flocked precipitate from the wastewater, and the flocked particles settle on the bottom of the clarifier to form a sludge. The sludge is re-distributed back into the clarifier to coagulate inert particles in the wastewater.
    Type: Grant
    Filed: October 2, 2002
    Date of Patent: November 16, 2004
    Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Max Sha, Howard Ting, Anderson Chen, Lung Chi Yang
  • System and process for CU-CMP wastewater treatment
    Publication number: 20040065621
    Abstract: A system for the treatment of CMP wastewater, including wastewater from a copper CMP process. The wastewater treatment system includes a coagulant supply tank from which an FSC polymer coagulant is directed into a reaction tank that separately receives the untreated wastewater. The coagulant may be mixed with the untreated wastewater in selected ratios to provide a desired dosing quantity of the coagulant in the reaction tank. As the wastewater and the FSC polymer coagulant are mixed in the reaction tank, the coagulant flocs the slurry chemicals in the wastewater and removes the chemicals from solution in the wastewater as a precipitate before the wastewater is directed to a clarifier. The clarifier separates the flocked precipitate from the wastewater, and the flocked particles settle on the bottom of the clarifier to form a sludge. The sludge is re-distributed back into the clarifier to coagulate inert particles in the wastewater.
    Type: Application
    Filed: October 2, 2002
    Publication date: April 8, 2004
    Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
    Inventors: Max Sha, Howard Ting, Anderson Chen, Lung Chi Yang