Patents by Inventor Max Sorensen

Max Sorensen has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • MULTI-LAYER DEPOSITION SYSTEM AND PROCESS
    Publication number: 20180237909
    Abstract: A modular multilayer deposition system includes a plurality of modular deposition chambers, including at least one parylene deposition chamber and at least one ALD deposition chamber. The parylene deposition chamber is connected in series with the ALD deposition chamber. Substrates are automatically moved from within the parylene deposition chamber to within the ALD deposition chamber or from within the ALD deposition chamber to the parylene deposition chamber.
    Type: Application
    Filed: August 30, 2017
    Publication date: August 23, 2018
    Inventors: Yang Yun, Max Sorensen, Chien-Lan Hsueh, Tining Su, Jim Dempster, Alex Anderson, Layton Baker