Patents by Inventor Maxim Kelman
Maxim Kelman has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
-
Patent number: 10096473Abstract: Described herein are techniques for forming an epitaxial III-V layer on a substrate. In a pre-clean chamber, a native oxygen layer may be replaced with a passivation layer by treating the substrate with a hydrogen plasma (or products of a plasma decomposition). In a deposition chamber, the temperature of the substrate may be elevated to a temperature less than 700° C. While the substrate temperature is elevated, a group V precursor may be flowed into the deposition chamber in order to transform the hydrogen terminated (Si—H) surface of the passivation layer into an Arsenic terminated (Si—As) surface. After the substrate has been cooled, a group III precursor and the group V precursor may be flowed in order to form a nucleation layer. Finally, at an elevated temperature, the group III precursor and group V precursor may be flowed in order to form a bulk III-V layer.Type: GrantFiled: April 7, 2016Date of Patent: October 9, 2018Assignee: AIXTRON SEInventors: Maxim Kelman, Zhongyuan Jia, Somnath Nag, Robert Ditizio
-
Patent number: 9966479Abstract: The present invention is directed to a paste composition comprising Al and Sn dispersed in an organic medium and to paste compositions that provide a solderable electrode. The present invention is further directed to an electrode formed from the paste composition and a semiconductor device and, in particular, a solar cell comprising such an electrode. The paste compositions that provide a solderable electrode are particularly useful for forming a solar cell back side solderable electrode.Type: GrantFiled: May 18, 2015Date of Patent: May 8, 2018Assignee: E I DU PONT DE NEMOURS AND COMPANYInventors: Elena V Rogojina, Gonghou Wang, Elizabeth Tai, Maxim Kelman
-
Patent number: 9793104Abstract: Provided is a method of epitaxial deposition, which involves dry-etching a semiconductor substrate with a fluorine containing species and exposing the dry-etched substrate to hydrogen atoms, prior to epitaxially depositing a semiconductor layer to the surface of the substrate.Type: GrantFiled: January 28, 2016Date of Patent: October 17, 2017Assignee: AIXTRON SEInventors: Maxim Kelman, Shahab Khandan, Scott Dunham, Tac van Huynh, Kenneth B. K. Teo
-
Publication number: 20170294306Abstract: Described herein are techniques for forming an epitaxial III-V layer on a substrate. In a pre-clean chamber, a native oxygen layer may be replaced with a passivation layer by treating the substrate with a hydrogen plasma (or products of a plasma decomposition). In a deposition chamber, the temperature of the substrate may be elevated to a temperature less than 700° C. While the substrate temperature is elevated, a group V precursor may be flowed into the deposition chamber in order to transform the hydrogen terminated (Si—H) surface of the passivation layer into an Arsenic terminated (Si—As) surface. After the substrate has been cooled, a group III precursor and the group V precursor may be flowed in order to form a nucleation layer. Finally, at an elevated temperature, the group III precursor and group V precursor may be flowed in order to form a bulk III-V layer.Type: ApplicationFiled: April 7, 2016Publication date: October 12, 2017Inventors: Maxim Kelman, Zhongyuan Jia, Somnath Nag, Robert Ditizio
-
Publication number: 20160225608Abstract: Provided is a method of epitaxial deposition, which involves dry-etching a semiconductor substrate with a fluorine containing species and exposing the dry-etched substrate to hydrogen atoms, prior to epitaxially depositing a semiconductor layer to the surface of the substrate.Type: ApplicationFiled: January 28, 2016Publication date: August 4, 2016Applicant: AIXTRONInventors: Maxim Kelman, Shahab Khandan, Scott Dunham, Tac van Huynh, Kenneth B.K. Teo
-
Patent number: 9306087Abstract: A method for manufacturing a photovoltaic cell with a locally diffused rear side, comprising steps of: (a) providing a doped silicon substrate, the substrate comprising a front, sunward facing, surface and a rear surface; (b) forming a silicon dioxide layer on the front surface and the rear surface; (c) depositing a boron-containing doping paste on the rear surface in a pattern, the boron-containing paste comprising a boron compound and a solvent; (d) depositing a phosphorus-containing doping paste on the rear surface in a pattern, the phosphorus-containing doping paste comprising a phosphorus compound and a solvent; (e) heating the silicon substrate in an ambient to a first temperature and for a first time period in order to locally diffuse boron and phosphorus into the rear surface of the silicon substrate.Type: GrantFiled: September 4, 2012Date of Patent: April 5, 2016Assignee: E I DU PONT DE NEMOURS AND COMPANYInventors: Giuseppe Scardera, Maxim Kelman, Elena V Rogojina, Dmitry Poplavskyy, Elizabeth Tai, Gonghou Wang
-
Publication number: 20150364615Abstract: The present invention is directed to a paste composition comprising Al and Sn dispersed in an organic medium and to paste compositions that provide a solderable electrode. The present invention is further directed to an electrode formed from the paste composition and a semiconductor device and, in particular, a solar cell comprising such an electrode. The paste compositions that provide a solderable electrode are particularly useful for forming a solar cell back side solderable electrode.Type: ApplicationFiled: May 18, 2015Publication date: December 17, 2015Inventors: ELENA V. ROGOJINA, GONGHOU WANG, ELIZABETH TAI, MAXIM KELMAN
-
Patent number: 9156740Abstract: A ceramic boron-containing dopant paste is disclosed. The ceramic boron-containing dopant paste further comprising a set of solvents, a set of ceramic particles dispersed in the set of solvents, a set of boron compound particles dispersed in the set of solvents, a set of binder molecules dissolved in the set of solvents. Wherein, the ceramic boron-containing dopant paste has a shear thinning power law index n between about 0.01 and about 1.Type: GrantFiled: May 3, 2011Date of Patent: October 13, 2015Assignee: Innovalight, Inc.Inventors: Maxim Kelman, Elena Rogojina, Gonghou Wang
-
Patent number: 9059341Abstract: A method for manufacturing an interdigitated back contact solar cell. comprising the steps of: (a) providing a silicon substrate doped with a first dopant; (b) doping the rear surface of the silicon substrate with a second dopant in a first pattern; (c) forming a silicon dioxide layer on the rear surface; (d) depositing a silicon-containing paste comprising silicon-containing particles on the silicon dioxide layer in a second pattern; (e) exposing the substrate to a diffusion ambient, wherein the diffusion ambient comprises a third dopant and wherein the third dopant is a counter dopant to the second dopant; (f) heating the substrate in a drive-in ambient; and (g) removing the silicon dioxide layer and the doped silicate glass layer from the silicon substrate, wherein a region doped with the second dopant and a region doped with the third dopant collectively form an interdigitated pattern on the rear surface of the silicon substrate.Type: GrantFiled: January 23, 2014Date of Patent: June 16, 2015Assignee: E I DU PONT DE NEMOURS AND COMPANYInventors: Giuseppe Scardera, Maxim Kelman, Shannon Dugan, Dmitry Poplavskyy, Daniel Aneurin Inns, Karim Lotfi Bendimerad
-
Publication number: 20140370640Abstract: A high-fidelity dopant paste is disclosed. The high-fidelity dopant paste includes a solvent, a set of non-glass matrix particles dispersed into the solvent, and a dopant.Type: ApplicationFiled: August 28, 2014Publication date: December 18, 2014Applicant: Innovalight, Inc.Inventors: Elena Rogojina, Maxim Kelman, Giuseppe Scardera
-
Patent number: 8889233Abstract: The present invention addresses provides improved methods of preparing a low-k dielectric material on a substrate. The methods involve multi-step ultraviolet curing processes in which UV intensity, wafer substrate temperature and other conditions may be independently modulated at each step. In certain embodiments, a film containing a structure former and a porogen is exposed to UV radiation in a first step to facilitate removal of the porogen and create a porous dielectric film. In a second step, the film is exposed to UV radiation to increase crosslinking within the porous film. In certain embodiments, the curing takes place in a multi-station UV chamber wherein UV intensity and substrate temperature may be independently controlled at each station.Type: GrantFiled: March 6, 2006Date of Patent: November 18, 2014Assignee: Novellus Systems, Inc.Inventors: Maxim Kelman, Krishnan Shrinivasan, Feng Wang, Victor Lu, Sean Chang, Guangquan Lu
-
Patent number: 8858843Abstract: A high-fidelity dopant paste is disclosed. The high-fidelity dopant paste includes a solvent, a set of non-glass matrix particles dispersed into the solvent, and a dopant.Type: GrantFiled: December 14, 2010Date of Patent: October 14, 2014Assignee: Innovalight, Inc.Inventors: Elena Rogojina, Maxim Kelman, Giuseppe Scardera
-
Publication number: 20140065764Abstract: A method for manufacturing a photovoltaic cell with a locally diffused rear side, comprising steps of: (a) providing a doped silicon substrate, the substrate comprising a front, sunward facing, surface and a rear surface; (b) forming a silicon dioxide layer on the front surface and the rear surface; (c) depositing a boron-containing doping paste on the rear surface in a pattern, the boron-containing paste comprising a boron compound and a solvent; (d) depositing a phosphorus-containing doping paste on the rear surface in a pattern, the phosphorus-containing doping paste comprising a phosphorus compound and a solvent; (e) heating the silicon substrate in an ambient to a first temperature and for a first time period in order to locally diffuse boron and phosphorus into the rear surface of the silicon substrate.Type: ApplicationFiled: September 4, 2012Publication date: March 6, 2014Applicant: INNOVALIGHT INCInventors: Giuseppe Scardera, Maxim Kelman, Elena V. Rogojina, Dmitry Poplavskyy, Elizabeth Tai, Gonghou Wang
-
Patent number: 8513104Abstract: A method of forming a floating junction on a substrate is disclosed. The method includes providing the substrate doped with boron atoms, the substrate comprising a front surface and a rear surface. The method also includes depositing a set of masking particles on the rear surface in a set of patterns; and heating the substrate in a baking ambient to a first temperature and for a first time period in order to create a particle masking layer. The method further includes exposing the substrate to a phosphorous deposition ambient at a second temperature and for a second time period, wherein a front surface PSG layer, a front surface phosphorous diffusion, a rear surface PSG layer, and a rear surface phosphorous diffusion are formed, and wherein a first phosphorous dopant surface concentration in the substrate proximate to the set of patterns is less than a second dopant surface concentration in the substrate not proximate to the set of patterns.Type: GrantFiled: June 29, 2011Date of Patent: August 20, 2013Assignee: Innovalight, Inc.Inventors: Malcolm Abbott, Maxim Kelman, Eric Rosenfeld, Elena Rogojina, Giuseppe Scardera
-
Patent number: 8471170Abstract: A plasma processing apparatus for producing a set of Group IV semiconductor nanoparticles from a precursor gas is disclosed. The apparatus includes an outer dielectric tube, the outer tube including an outer tube inner surface and an outer tube outer surface, wherein the outer tube inner surface has an outer tube inner surface etching rate. The apparatus also includes an inner dielectric tube, the inner dielectric tube including an inner tube outer surface, wherein the outer tube inner surface and the inner tube outer surface define an annular channel, and further wherein the inner tube outer surface has an inner tube outer surface etching rate. The apparatus further includes a first outer electrode, the first outer electrode having a first outer electrode inner surface disposed on the outer tube outer surface.Type: GrantFiled: May 1, 2008Date of Patent: June 25, 2013Assignee: Innovalight, Inc.Inventors: Xuegeng Li, Christopher Alcantara, Maxim Kelman, Elena Rogojina, Eric Schiff, Mason Terry, Karel Vanheusden
-
Publication number: 20130119319Abstract: A ceramic boron-containing dopant paste is disclosed. The ceramic boron-containing dopant paste further comprising a set of solvents, a set of ceramic particles dispersed in the set of solvents, a set of boron compound particles dispersed in the set of solvents, a set of binder molecules dissolved in the set of solvents. Wherein, the ceramic boron-containing dopant paste has a shear thinning power law index n between about 0.01 and about 1.Type: ApplicationFiled: May 3, 2012Publication date: May 16, 2013Applicant: INNOVALIGHT INCInventors: MAXIM KELMAN, Elena V. Rogojina, Gonghou Wang
-
Patent number: 8420517Abstract: A method of forming a multi-doped junction on a substrate is disclosed. The method includes providing the substrate doped with boron atoms, the substrate comprising a front substrate surface. The method further includes depositing an ink on the front substrate surface in a ink pattern, the ink comprising a set of silicon-containing particles and a set of solvents. The method also includes heating the substrate in a baking ambient to a first temperature and for a first time period in order to create a densified film ink pattern.Type: GrantFiled: February 12, 2010Date of Patent: April 16, 2013Assignee: Innovalight, Inc.Inventors: Giuseppe Scardera, Shihai Kan, Maxim Kelman, Dmitry Poplavskyy
-
Publication number: 20120280183Abstract: A ceramic boron-containing dopant paste is disclosed. The ceramic boron-containing dopant paste further comprising a set of solvents, a set of ceramic particles dispersed in the set of solvents, a set of boron compound particles dispersed in the set of solvents, a set of binder molecules dissolved in the set of solvents. Wherein, the ceramic boron-containing dopant paste has a shear thinning power law index n between about 0.01 and about 1.Type: ApplicationFiled: May 3, 2011Publication date: November 8, 2012Inventors: Maxim Kelman, Elena Rogojina, Gonghou Wang
-
Patent number: 8273669Abstract: A method for forming a passivated densified nanoparticle thin film on a substrate in a chamber is disclosed. The method includes depositing a nanoparticle ink on a first region on the substrate, the nanoparticle ink including a set of Group IV semiconductor particles and a solvent. The method also includes heating the nanoparticle ink to a first temperature between about 30° C. and about 400° C., and for a first time period between about 1 minute and about 60 minutes, wherein the solvent is substantially removed, and a porous compact is formed. The method further includes flowing an oxidizer gas into the chamber; and heating the porous compact to a second temperature between about 600° C. and about 1000° C., and for a second time period of between about 5 seconds and about 1 hour; wherein the passivated densified nanoparticle thin film is formed.Type: GrantFiled: November 4, 2010Date of Patent: September 25, 2012Assignee: Innovalight, Inc.Inventors: Dmitry Poplavskyy, Maxim Kelman, Mason Terry
-
Patent number: 8247312Abstract: A method of printing an ink on a wafer surface configured with a set of non-rounded peaks and a set of non-rounded valleys is disclosed. The method includes exposing the wafer including at least some non-rounded peaks and at least some of the non-rounded valleys in a region to an etchant. The method further includes depositing the ink on the region, wherein a set of rounded peaks and a set of rounded valleys are formed.Type: GrantFiled: April 24, 2008Date of Patent: August 21, 2012Assignee: Innovalight, Inc.Inventors: Malcolm Abbott, Maxim Kelman, Karel Vanheusden