Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.

Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.

Abstract: An optical fiber, an apparatus for receiving input radiation and broadening a frequency range, a radiation source, a metrology arrangement and a lithographic apparatus are provided. The optical fiber comprises a hollow core, a cladding portion and a support portion. The cladding portion surrounds the hollow core and comprises a plurality of anti-resonance elements for guiding radiation through the hollow core. The support portion surrounds and supports the cladding portion and comprises an inner support portion, an outer support portion and a deformable connecting portion that connects the inner support portion to the outer support portion.

Abstract: An actuating apparatus for a vehicle part contains an actuating motor for generating an actuating force under the action of which the vehicle part can be adjusted between a closed state and an open state along an actuating path. The actuating apparatus also contains a control unit which is configured to carry out an actuating method in which, according to the method, a position measure is continuously ascertained when the vehicle part is adjusted, the position measure being characteristic of the current actuating position of the vehicle part along the actuating path. Furthermore, the position measure is set to a prespecified reference value when the vehicle part is in the closed state and when a further condition is additionally met, the further condition being linked in a reproducible manner with a specific actuating position.

Abstract: An actuating apparatus for a vehicle part contains an actuating motor for generating an actuating force under the action of which the vehicle part can be adjusted between a closed state and an open state along an actuating path. The actuating apparatus also contains a control unit which is configured to carry out an actuating method in which, according to the method, a position measure is continuously ascertained when the vehicle part is adjusted, the position measure being characteristic of the current actuating position of the vehicle part along the actuating path. Furthermore, the position measure is set to a prespecified reference value when the vehicle part is in the closed state and when a further condition is additionally met, the further condition being linked in a reproducible manner with a specific actuating position.

Abstract: An endoscope (1) includes a first beam path (3) formed at least at a distal end (2), and an image recording chip (5), which captures the first beam path (3). The endoscope includes a shutter apparatus (7) having a shutter element (8) composed of a semiconductor material, which is formed in the first beam path (3). The shutter element (8) is arranged adjustably between a position that releases the first beam path (3) and a position that alters a transmission in the first beam path (3), in particular a position that switches off the first beam path (3).