Patents by Inventor Maximilian Gotz
Maximilian Gotz has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Publication number: 20240061314Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.Type: ApplicationFiled: September 27, 2023Publication date: February 22, 2024Applicant: ASML NETHERLANDS B.V.Inventors: Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL
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Publication number: 20240053532Abstract: A radiation source for generating broadband radiation, the source including an input assembly for providing input radiation and a hollow-core photonic crystal fiber configured to receive and confine the input radiation coupled into the fiber for generating broadband radiation through spectral broadening, wherein the input assembly includes a pump source configured to provide input radiation having an average power of at least 50 W, and wherein the hollow core photonic crystal fiber includes: a hollow core having a diameter of at least 35 ?m; and a cladding region including a plurality of anti-resonant structures surrounding the hollow core, the anti-resonant structures including a wall portion having a wall thickness smaller than half the wavelength of the lower end of a wavelength range of the broadband radiation.Type: ApplicationFiled: December 20, 2021Publication date: February 15, 2024Applicant: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ
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Publication number: 20240004319Abstract: A radiation source for generating broadband radiation, the source including: a pump source having only one single fiber amplifier configured to generate pump radiation including a plurality of radiation pulses having a pulse energy of 2.5 ?J or less; and a hollow core fiber having a hollow core region and a cladding surrounding the hollow core region, the hollow core region having a pressurized gas therein, and the hollow core fiber being arranged to receive, at an input end, the pump radiation, wherein the hollow core region is dimensioned such that the radiation pulses have a soliton order higher than 16 so as to broaden a spectrum of the pump radiation using modulation instability as the pump radiation propagates along the hollow-core fiber, for providing output broadband radiation from an output end of the hollow core fiber.Type: ApplicationFiled: November 25, 2021Publication date: January 4, 2024Applicant: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian UEBEL, Willem Richard PONGERS, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GOTZ, Ludovicus VAN DEN OETELAAR
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Publication number: 20240004127Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.Type: ApplicationFiled: August 15, 2023Publication date: January 4, 2024Applicant: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian UEBEL, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Coen Hubertus Matheus Baltis, Janneke Ravensbergen
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Patent number: 11774828Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.Type: GrantFiled: May 4, 2021Date of Patent: October 3, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel
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Patent number: 11774671Abstract: Optical components and methods of manufacture thereof. A first optical component has a hollow-core photonic crystal fiber includes internal capillaries for guiding radiation and an outer capillary sheathing the internal capillaries; and at least an output end section having a larger inner cross-sectional dimension over at least a portion of the output end section than an inner cross-sectional dimension of the outer capillary along a central portion of the hollow-core photonic crystal fiber prior to the output end section. A second optical component includes a hollow-core photonic crystal fiber and a sleeve arrangement.Type: GrantFiled: October 22, 2020Date of Patent: October 3, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Patrick Sebastian Uebel, Peter Maximilian Götz, Sebastian Thomas Bauerschmidt, Coen Hubertus Matheus Baltis, Janneke Ravensbergen
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Patent number: 11754906Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: GrantFiled: January 5, 2023Date of Patent: September 12, 2023Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz
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Publication number: 20230280660Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: ApplicationFiled: May 11, 2023Publication date: September 7, 2023Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL, Ronald Franciscus Herman HUGERS, Jan Adrianus BOER, Edwin Johannes Cornelis BOS, Andreas Johannes Antonius BROUNS, Vitaliy PROSYENTSOV, Paul William SCHOLTES - VAN EIJK, Paulus Antonius Andreas TEUNISSEN, Mahesh Upendra AJGAONKAR
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Patent number: 11703634Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.Type: GrantFiled: June 9, 2022Date of Patent: July 18, 2023Assignee: ASML NETHERLANDS B.V.Inventors: Sebastian Thomas Bauerschmidt, Patrick Sebastian Uebel, Peter Maximilian Götz
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Patent number: 11687009Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: GrantFiled: May 11, 2022Date of Patent: June 27, 2023Assignees: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Publication number: 20230146877Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: ApplicationFiled: January 5, 2023Publication date: May 11, 2023Applicant: ASML Netherlands B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ
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Patent number: 11600944Abstract: An electrical feedthrough (1) is provided for improving the thermal properties and the electromagnetic compatibility (EMC) and also for simplified production of a medical instrument (7), in which electrical feedthrough individual contact pins (4), which are guided through a glass body (2) in a housing (20) of the instrument (7), are electrically connected to one another by a pluggable plug element (5), preferably in the form of a sheet metal part. Here, the plug element (5) firstly provides high thermal and electrical conductivity and secondly provides a shielding area that effectively prevents the input coupling of electromagnetic radiation. Preferably, the plug element (5) is formed in such a way that it independently develops a holding force for securing itself to the contact pins (4).Type: GrantFiled: October 22, 2019Date of Patent: March 7, 2023Assignee: Schölly Fiberoptic GmbHInventors: Andreas Hanselmann, Steffen Paul, Maximilian Gotz
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Patent number: 11556044Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: GrantFiled: September 27, 2021Date of Patent: January 17, 2023Assignee: ASML Netherlands B.V.Inventors: Patrick Sebastian Uebel, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz
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Publication number: 20220317368Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.Type: ApplicationFiled: June 9, 2022Publication date: October 6, 2022Applicant: ASML NETHERLANDS B. V.Inventors: Sebastian Thomas BAUERSCHMIDT, Patrick Sebastian UEBEL, Peter Maximilian GÕTZ
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Publication number: 20220269183Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: ApplicationFiled: May 11, 2022Publication date: August 25, 2022Applicants: ASML NETHERLANDS B.V., ASML HOLDING N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes - Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Patent number: 11385402Abstract: A mounted hollow-core fiber arrangement includes a hollow-core fiber having a microstructure, and a mount arrangement including a plurality of mounting contacts configured to apply a force to an outer layer of the hollow-core fiber. A portion of the hollow-core fiber is located in a receiving region of the mount arrangement. The plurality of mounting contacts are positioned around the receiving region. The mounting contacts are distributed around the receiving region, the distribution of the mounting contacts corresponding to a distribution of features of the microstructure of the hollow-core fiber. The mounted hollow core fiber can be used in a radiation source apparatus for providing broadband radiation.Type: GrantFiled: June 17, 2020Date of Patent: July 12, 2022Assignee: ASML Netherlands B.V.Inventors: Sebastian Thomas Bauerschmidt, Patrick Sebastian Uebel, Peter Maximilian Götz
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Patent number: 11360396Abstract: A mode control system and method for controlling an output mode of a broadband radiation source including a photonic crystal fiber (PCF). The mode control system includes at least one detection unit configured to measure one or more parameters of radiation emitted from the broadband radiation source to generate measurement data, and a processing unit configured to evaluate mode purity of the radiation emitted from the broadband radiation source, from the measurement data. Based on the evaluation, the mode control system is configured to generate a control signal for optimization of one or more pump coupling conditions of the broadband radiation source. The one or more pump coupling conditions relate to the coupling of a pump laser beam with respect to a fiber core of the photonic crystal fiber.Type: GrantFiled: August 27, 2020Date of Patent: June 14, 2022Assignees: ASML Netherlands B.V., ASML Holding N.V.Inventors: Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Patrick Sebastian Uebel, Ronald Franciscus Herman Hugers, Jan Adrianus Boer, Edwin Johannes Cornelis Bos, Andreas Johannes Antonius Brouns, Vitaliy Prosyentsov, Paul William Scholtes-Van Eijk, Paulus Antonius Andreas Teunissen, Mahesh Upendra Ajgaonkar
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Patent number: 11287747Abstract: A system and method for providing a radiation source is disclosed. In one arrangement, the radiation source includes a gas cell having a window, an optical fiber that is hollow and has an axial direction, an end thereof being enclosed within the gas cell and optically coupled to the window via an optical path, and a surface, disposed around the end of the optical fiber, and extending past the end of the optical fiber in the axial direction towards the window so as to limit one or more selected from: the exchange of gas between the optical path and the remainder of the gas cell, ingress of plasma towards or into the optical fiber, and/or radical flux towards etch-susceptible surfaces.Type: GrantFiled: August 3, 2020Date of Patent: March 29, 2022Assignee: ASML Netherlands B.V.Inventors: Andrey Nikipelov, Patrick Sebastian Uebel, Amir Abdolvand, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz, Natallia Eduardauna Uzunbajakava
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Publication number: 20220011644Abstract: Disclosed is an optical component, being configured to function as an optical frequency converter in a broadband radiation source device. The optical component comprises a gas cell, and a hollow-core photonic crystal fiber at least partially enclosed within said gas cell. The local cavity volume of said gas cell, where said hollow-core photonic crystal fiber is enclosed within the gas cell, comprises a maximum value of 36 cm3 per cm of length of said hollow-core photonic crystal fiber.Type: ApplicationFiled: September 27, 2021Publication date: January 13, 2022Applicant: ASML Netherlands B.V.Inventors: Patrick Sebastian UEBEL, Sebastian Thomas Bauerschmidt, Peter Maximilian Götz
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Publication number: 20210364885Abstract: A supercontinuum radiation source including a modulator being operable to modulate pump laser radiation including a train of radiation pulses to provide modulated pump laser radiation, the modulation being such to selectively provide a burst of the pulses; and a hollow-core photonic crystal fiber being operable to receive the modulated pump laser radiation and excite a working medium contained within the hollow-core photonic crystal fiber so as to generate supercontinuum radiation.Type: ApplicationFiled: May 4, 2021Publication date: November 25, 2021Applicant: ASML NETHERLANDS B.V.Inventors: Sebastian Thomas BAUERSCHMIDT, Peter Maximilian GÖTZ, Patrick Sebastian UEBEL