Patents by Inventor Maximilian Stadler

Maximilian Stadler has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20230375670
    Abstract: An apparatus for sensing surroundings of a motor vehicle includes a laser sensing device for sensing surroundings of the motor vehicle, a mount which is fixedly connected to the sensing device and is designed to attach the sensing device to a body of the motor vehicle, and an outer skin component. The mount and the outer skin component each have an end face which faces the other end face. A method is provided for producing a surroundings sensing apparatus by use of laser transmission welding.
    Type: Application
    Filed: November 4, 2021
    Publication date: November 23, 2023
    Inventors: Thomas RABL, Maximilian STADLER
  • Patent number: 9815231
    Abstract: A method for manufacturing a breast prosthesis, in which a film bag is welded together from at least three film layers for producing at least two chambers.
    Type: Grant
    Filed: April 29, 2015
    Date of Patent: November 14, 2017
    Assignee: AMOENA MEDIZIN-ORTHOPADE-TECHNIK GMBH
    Inventor: Maximilian Stadler
  • Publication number: 20150314493
    Abstract: A method for manufacturing a breast prosthesis, in which a film bag is welded together from at least three film layers for producing at least two chambers.
    Type: Application
    Filed: April 29, 2015
    Publication date: November 5, 2015
    Inventor: Maximilian Stadler
  • Patent number: 7972963
    Abstract: A polished semiconductor wafer has a front surface and a back surface and an edge R, which is located at a distance of a radius from a center of the semiconductor wafer, forms a periphery of the semiconductor wafer and is part of a profiled boundary of the semiconductor wafer. The maximum deviation of the flatness of the back surface from an ideal plane in a range between R-6 mm and R-1 mm of the back surface is 0.7 ?m or less. A process for producing the semiconductor wafer, comprises at least one treatment of the semiconductor wafer with a liquid etchant and at least one polishing of at least a front surface of the semiconductor wafer, the etchant flowing onto a boundary of the semiconductor wafer during the treatment, and the boundary of the semiconductor wafer which faces the flow of etchant being at least partially shielded from being struck directly by the etchant. The shielding extends in the direction of a thickness d of the semiconductor wafer and is at least d+100 ?m long.
    Type: Grant
    Filed: October 11, 2007
    Date of Patent: July 5, 2011
    Assignee: Siltronic AG
    Inventors: Thomas Teuschler, Guenter Schwab, Maximilian Stadler
  • Publication number: 20100290973
    Abstract: A method for providing liquid silicon comprising the method steps of filling (10) at least one crucible (50; 50a, 50b, 50c, 50d) with solid silicon (52), melting (12) the solid silicon (52) situated in the at least one crucible (50; 50a, 50b, 50c, 50d), and feeding (14; 24) liquid silicon (58) to the silicon (54) situated in the at least one crucible (50; 50a, 50b, 50c, 50d), and a device for carrying out the method.
    Type: Application
    Filed: May 12, 2010
    Publication date: November 18, 2010
    Applicant: CENTROTHERM SITEC GMBH
    Inventors: Alrbrecht Mozer, Maximilian Stadler
  • Patent number: 7829467
    Abstract: Semiconductor wafers are cut from a crystal and subjected to a series of processing steps in which material is removed from a front side and a rear side of the semiconductor wafers, comprising the following processing steps: a mechanical processing step, an etching step in which the semiconductor wafers are oxidized and material is removed from the front side of the wafers with the aid of a gaseous etchant containing hydrofluoric acid at a temperature of 20 to 70° C., and a polishing step in which the front side of the semiconductor wafer is polished, the processing steps in which the front side of the semiconductor wafer is polished causing material removal which does not amount to more than 5 ?m in total.
    Type: Grant
    Filed: May 4, 2007
    Date of Patent: November 9, 2010
    Assignee: Siltronic AG
    Inventors: Maximilian Stadler, Günter Schwab, Diego Feijóo, Karlheinz Langsdorf
  • Publication number: 20080057714
    Abstract: A polished semiconductor wafer has a front surface and a back surface and an edge R, which is located at a distance of a radius from a center of the semiconductor wafer, forms a periphery of the semiconductor wafer and is part of a profiled boundary of the semiconductor wafer. The maximum deviation of the flatness of the back surface from an ideal plane in a range between R-6 mm and R-1 mm of the back surface is 0.7 ?m or less. A process for producing the semiconductor wafer, comprises at least one treatment of the semiconductor wafer with a liquid etchant and at least one polishing of at least a front surface of the semiconductor wafer, the etchant flowing onto a boundary of the semiconductor wafer during the treatment, and the boundary of the semiconductor wafer which faces the flow of etchant being at least partially shielded from being struck directly by the etchant. The shielding extends in the direction of a thickness d of the semiconductor wafer and is at least d+100 ?m long.
    Type: Application
    Filed: October 11, 2007
    Publication date: March 6, 2008
    Applicant: Siltronic AG
    Inventors: Thomas Teuschler, Guenter Schwab, Maximilian Stadler
  • Publication number: 20070259531
    Abstract: Semiconductor wafers are cut from a crystal and subjected to a series of processing steps in which material is removed from a front side and a rear side of the semiconductor wafers, comprising the following processing steps: a mechanical processing step, an etching step in which the semiconductor wafers are oxidized and material is removed from the front side of the wafers with the aid of a gaseous etchant containing hydrofluoric acid at a temperature of 20 to 70° C., and a polishing step in which the front side of the semiconductor wafer is polished, the processing steps in which the front side of the semiconductor wafer is polished causing material removal which does not amount to more than 5 ?m in total.
    Type: Application
    Filed: May 4, 2007
    Publication date: November 8, 2007
    Applicant: SILTRONIC AG
    Inventors: Maximilian Stadler, Gunter Schwab, Diego Feijoo, Karlheinz Langsdorf
  • Patent number: 7083741
    Abstract: A device and process for the wet-chemical treatment of silicon using an etching liquid that contains water, nitric acid and hydrofluoric acid. The etching liquid is activated by introducing nitrogen oxide (NOx) into the etching liquid, before being used for the wet-chemical treatment of silicon. The device consists of a first vessel in which silicon is subjected to a wet-chemical treatment with the aid of an etching liquid, a second vessel in which fresh etching liquid is held ready, and a connecting line between the first vessel and the second vessel, through which nitrogen oxides (NOx) formed in the first vessel during the wet-chemical treatment are passed to the second vessel.
    Type: Grant
    Filed: October 15, 2003
    Date of Patent: August 1, 2006
    Assignee: Siltronic AG
    Inventors: Maximilian Stadler, Günter Schwab, Helmut Franke
  • Publication number: 20060138539
    Abstract: A process for treating a semiconductor wafer with a gaseous medium containing hydrogen fluoride and at least one oxidizing agent which oxidizes the surface of the semiconductor wafer, involves flowing the gaseous medium onto the surface of the semiconductor wafer at a relative velocity in the range from 40 mm/s to 300 m/s. Semiconductor wafers and an SOI wafers prepared by the process have a low roughness and metal concentration in the absence of a subsequent polishing step.
    Type: Application
    Filed: December 21, 2005
    Publication date: June 29, 2006
    Applicant: Siltronic AG
    Inventors: Maximilian Stadler, Guenter Schwab, Christoph Frey, Peter Stallhofer
  • Publication number: 20040266191
    Abstract: A process for the wet-chemical surface treatment of a semiconductor wafer has the semiconductor wafer being treated with an acidic liquid, with at most 10 &mgr;m of material being removed from each surface of the semiconductor wafer, and then this wafer is treated with an alkaline liquid, with at least sufficient material being removed for the crystal regions which have been damaged by a previous mechanical treatment to be completely removed.
    Type: Application
    Filed: June 25, 2004
    Publication date: December 30, 2004
    Inventors: Gunter Schwab, Helmut Franke, Helmut Paltzer, Manfred Schofberger, Maximilian Stadler
  • Publication number: 20040222416
    Abstract: A polished semiconductor wafer has a front surface and a back surface and an edge R, which is located at a distance of a radius from a center of the semiconductor wafer, forms a periphery of the semiconductor wafer and is part of a profiled boundary of the semiconductor wafer. The maximum deviation of the flatness of the back surface from an ideal plane in a range between R-6 mm and R-1 mm of the back surface is 0.7 &mgr;m or less. A process for producing the semiconductor wafer, comprises at least one treatment of the semiconductor wafer with a liquid etchant and at least one polishing of at least a front surface of the semiconductor wafer, the etchant flowing onto a boundary of the semiconductor wafer during the treatment, and the boundary of the semiconductor wafer which faces the flow of etchant being at least partially shielded from being struck directly by the etchant. The shielding extends in the direction of a thickness d of the semiconductor wafer and is at least d+100 &mgr;m long.
    Type: Application
    Filed: January 21, 2004
    Publication date: November 11, 2004
    Inventors: Thomas Teuschler, Gunter Schwab, Maximilian Stadler
  • Publication number: 20040129679
    Abstract: A device and process for the wet-chemical treatment of silicon using an etching liquid that contains water, nitric acid and hydrofluoric acid. The etching liquid is activated by introducing nitrogen oxide (NOx) into the etching liquid, before being used for the wet-chemical treatment of silicon. The device consists of a first vessel in which silicon is subjected to a wet-chemical treatment with the aid of an etching liquid, a second vessel in which fresh etching liquid is held ready, and a connecting line between the first vessel and the second vessel, through which nitrogen oxides (NOx) formed in the first vessel during the wet-chemical treatment are passed to the second vessel.
    Type: Application
    Filed: October 15, 2003
    Publication date: July 8, 2004
    Inventors: Maximilian Stadler, Gunter Schwab, Helmut Franke
  • Patent number: 6610213
    Abstract: A process for the wet chemical treatment of a semiconductor wafer in a vessel, in which the semiconductor wafer is brought into contact with a liquid in which very small gas bubbles are dispersed. Two circuits are set up for conveying the liquid, with a first circuit between a reservoir and the vessel, for conveying the liquid from the reservoir to the vessel; and with a second circuit from the reservoir back to the reservoir, in order to enrich the liquid with a gas on the way back to the reservoir, so that the gas bubbles can form.
    Type: Grant
    Filed: May 19, 2000
    Date of Patent: August 26, 2003
    Assignee: Wacker Siltronic Gesellschaft für Halbleitermaterialien
    Inventors: Günter Schwab, Maximilian Stadler
  • Patent number: 6530381
    Abstract: A process for the wet-chemical surface treatment of a semiconductor wafer following a mechanical surface treatment, in particular following a mechanical surface treatment in a lapping machine, includes a sequence of treatment steps. The process essentially includes a wet-chemical surface cleaning, preferably for neutralizing and eliminating the lapping slurry, an acid etching treatment, preferably for eliminating the mechanically imposed damage and for surface smoothing and removal of metals. There is a final step of drying and rendering the cleaned and etched surface hydrophilic.
    Type: Grant
    Filed: November 2, 2000
    Date of Patent: March 11, 2003
    Assignee: Wacker Siltronic Gesellschaft Für Halbleitermaterialien AG
    Inventors: Günter Schwab, Karlheinz Langsdorf, Maximilian Stadler, Edeltraut Pichelmeier
  • Patent number: 5587046
    Abstract: A process for treating semiconductor material with an acid-containing fluid, has water being formed as a product of a chemical reaction. Before and/or during the treatment of the semiconductor material, phosphorus pentoxide is added to the acid-containing fluid.
    Type: Grant
    Filed: April 10, 1995
    Date of Patent: December 24, 1996
    Assignee: Wacker Siltronic Gesellschaft Fur Halbleitermaterialien Aktiengesellschaft
    Inventors: Maximilian Stadler, Gunter Schwab, Peter Romeder, Gabriele Trifellner
  • Patent number: 5236548
    Abstract: A magazine is provided for holding disk-type workpieces, in particular seonductor wafers, in the wet-chemical surface treatment in liquid baths. The magazine is particularly useful for etching semiconductor wafers in a liquid bath, which contains an insert (5) which has a diameter of 1.1-1.9 times the diameter of the wafer (6) and which has arrangements of guide strut assemblies (12) held parallel at a spacing of at least twice the wafer thickness by spacing struts (8). The guide strut assemblies (12) comprise main guide struts (9) and subsidiary guide struts (10) which diverge at the linking points (13), which do not lie on the housing axis, in not more than three directions. This etching magazine makes possible a marked reduction in the deterioration in the wafer geometry normally observed in etching treatments.
    Type: Grant
    Filed: January 21, 1992
    Date of Patent: August 17, 1993
    Assignee: Wacker-Chemitronic Gesellschaft Fur Elektronik-Grundstoffe mbH
    Inventors: Maximilian Stadler, Schwab Gunter, Peter Romeder