Patents by Inventor May M. Hsu

May M. Hsu has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Automatic alignment apparatus having low and high resolution optics for coarse and fine adjusting
    Patent number: 4845373
    Abstract: An optico-mechanical alignment apparatus having at least two optical paths, one with low resolution and one with high resolution providing an image to video image generator. The image forms a first data set that is compared to a second data set representative of the preferred alignment of an object to be aligned by a comparison means that can automatically move a stage mounting the object to be aligned in the X, Y and Z directions and rotate it in the X Y plane. The object is coarsely aligned with the low resolution optics and then finely aligned with the high resolution optics.
    Type: Grant
    Filed: August 25, 1986
    Date of Patent: July 4, 1989
    Assignee: KLA Instruments Corporation
    Inventors: John Jamieson, May M. Hsu