Patents by Inventor Mayumi KUSAKAWA

Mayumi KUSAKAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processing apparatus
    Patent number: 11031277
    Abstract: A processing apparatus includes a holding table. The holding table includes a frustoconical portion and a wafer holding portion formed on the upper surface of the frustoconical portion for holding the wafer. Light is applied from a light emitting member to the side surface of the frustoconical portion and next reflected on the side surface of the frustoconical portion. The light reflected is applied to the outer circumference of the wafer held on the wafer holding portion of the holding table to thereby image the outer circumference of the wafer by an imaging unit.
    Type: Grant
    Filed: August 29, 2019
    Date of Patent: June 8, 2021
    Assignee: DISCO CORPORATION
    Inventors: Mayumi Kusakawa, Yukiyasu Masuda
  • PROCESSING APPARATUS
    Publication number: 20200083081
    Abstract: A processing apparatus includes a holding table. The holding table includes a frustoconical portion and a wafer holding portion formed on the upper surface of the frustoconical portion for holding the wafer. Light is applied from a light emitting member to the side surface of the frustoconical portion and next reflected on the side surface of the frustoconical portion. The light reflected is applied to the outer circumference of the wafer held on the wafer holding portion of the holding table to thereby image the outer circumference of the wafer by an imaging unit.
    Type: Application
    Filed: August 29, 2019
    Publication date: March 12, 2020
    Inventors: Mayumi KUSAKAWA, Yukiyasu MASUDA