Patents by Inventor Mazakazu Kawata

Mazakazu Kawata has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20110316127
    Abstract: A spacer formation film is adapted to be used for forming a spacer defining air-gap portions on a side of one surface of a semiconductor wafer and by being cut into a desired shape, the spacer formation film includes: a support base having a sheet-like shape; a spacer formation layer provided on the support base and having a bonding property, the spacer formation layer formed of a material containing an alkali soluble resin, a thermosetting resin and a photo polymerization initiator; and a cutting line along which the spacer formation film is to be cut, wherein the spacer formation layer is provided inside the cutting line so that a peripheral edge thereof is not overlapped to the cutting line.
    Type: Application
    Filed: February 19, 2010
    Publication date: December 29, 2011
    Inventors: Fumihiro Shiraishi, Mazakazu Kawata, Masahiro Yoneyama, Toyosei Takahashi, Hirohisa Dejima, Toshihiro Sato