Patents by Inventor Mazan Saied

Mazan Saied has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of determining an applicable threshold for determining the critical dimension of at least one category of patterns imaged by atomic force scanning electron microscopy
    Patent number: 8723116
    Abstract: A method of determining an applicable threshold for determining the critical dimension of a category of patterns imaged by atomic force scanning electron microscopy is presented. The method includes acquiring, from a plurality of patterns, a pair of images for each pattern; for each pair of images determining a reference critical dimension via an image obtained by a reference instrumentation and determining an empirical threshold applicable to an image obtained by a CD-SEM instrumentation such that the empirical threshold substantially corresponds to the reference critical dimension; determining a threshold applicable to a category of patterns, the threshold being determined from a plurality of empirical thresholds.
    Type: Grant
    Filed: May 3, 2013
    Date of Patent: May 13, 2014
    Assignee: Commissariat a l'energie atomique et aux energies alternatives
    Inventors: Johann Foucher, Mazan Saied