Patents by Inventor Md Hossain Toufiq Imam

Md Hossain Toufiq Imam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Energy correction module for an optical source apparatus
    Patent number: 11947268
    Abstract: A system for deep ultraviolet (DUV) optical lithography includes an optical source apparatus including N optical oscillators, N being an integer number greater than or equal to two, and each of the N optical oscillators is configured to produce a pulse of light in response to an excitation signal; and a control system coupled to the optical source apparatus. The control system is configured to determine a corrected excitation signal for a first one of the N optical oscillators based on an input signal, the input signal including an energy property of a pulse of light produced by another one of the N optical oscillators.
    Type: Grant
    Filed: December 2, 2020
    Date of Patent: April 2, 2024
    Assignee: Cymer, LLC
    Inventors: Yingbo Zhao, Md Hossain Toufiq Imam
  • ENERGY CORRECTION MODULE FOR AN OPTICAL SOURCE APPARATUS
    Publication number: 20230019832
    Abstract: A system for deep ultraviolet (DUV) optical lithography includes an optical source apparatus including N optical oscillators, N being an integer number greater than or equal to two, and each of the N optical oscillators is configured to produce a pulse of light in response to an excitation signal; and a control system coupled to the optical source apparatus. The control system is configured to determine a corrected excitation signal for a first one of the N optical oscillators based on an input signal, the input signal including an energy property of a pulse of light produced by another one of the N optical oscillators.
    Type: Application
    Filed: December 2, 2020
    Publication date: January 19, 2023
    Inventors: Yingbo Zhao, Md Hossain Toufiq Imam