Patents by Inventor Meenakshinathan Ash Parameswaran

Meenakshinathan Ash Parameswaran has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Lithographically controlled curvature for MEMS devices and antennas
    Patent number: 7936240
    Abstract: Lithographically fabricated apparatus are provided. The apparatus are capable of self-assembly to extend at least in part in an out-of-plane direction. A cantilever arm is anchored to a substrate at one of its ends and fabricated to provide a cantilever portion that extends from the anchor in a longitudinal direction generally parallel to the substrate, One or more posts are fabricated atop the cantilever portion. The posts shrink from a first volume to a second volume, less than the first volume, during fabrication thereof. The change in volume of the post from the first volume to the second volume causes stress between the post and the cantilever arm resulting in the cantilever portion bending from an in-plane orientation extending in the longitudinal direction to a self-assembled orientation extending at least in part in an out-of-plane direction away from the substrate.
    Type: Grant
    Filed: August 11, 2008
    Date of Patent: May 3, 2011
    Assignee: Simon Fraser University
    Inventors: Sae Won Lee, Daniel Elliot Sameoto, Meenakshinathan Ash Parameswaran, Alireza Mahanfar, Rodney Grant Vaughan
  • LITHOGRAPHICALLY CONTROLLED CURVATURE FOR MEMS DEVICES AND ANTENNAS
    Publication number: 20090046018
    Abstract: Lithographically fabricated apparatus are provided. The apparatus are capable of self-assembly to extend at least in part in an out-of-plane direction. A cantilever arm is anchored to a substrate at one of its ends and fabricated to provide a cantilever portion that extends from the anchor in a longitudinal direction generally parallel to the substrate, One or more posts are fabricated atop the cantilever portion. The posts shrink from a first volume to a second volume, less than the first volume, during fabrication thereof. The change in volume of the post from the first volume to the second volume causes stress between the post and the cantilever arm resulting in the cantilever portion bending from an in-plane orientation extending in the longitudinal direction to a self-assembled orientation extending at least in part in an out-of-plane direction away from the substrate.
    Type: Application
    Filed: August 11, 2008
    Publication date: February 19, 2009
    Inventors: Sae Won Lee, Daniel Elliot Sameoto, Meenakshinathan Ash Parameswaran, Alireza Mahanfar, Rodney Grant Vaughan