Patents by Inventor Meer Saiful HASSAN

Meer Saiful HASSAN has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20140284404
    Abstract: Disclosed is a chemical vapour deposition injector 100, comprising a gas injector body 104 having a plurality of holes for directing a first gas from a first gas plenum into respective first gas channels of the gas injector body, each first gas channel extending in a first direction and arranged to branch into separate flow paths; a plurality of discrete first conduits, each first conduit being arranged to connect to a respective one of the discrete flow paths for carrying the first gas to a reaction chamber; a second gas channel for directing a second gas from a second gas plenum into the gas injector body, the second gas channel having a longitudinal axis which extends in a second direction transverse to the first direction; and a plurality of discrete second conduits coupled to the second gas channel and arranged to carry the second gas from the second gas channel to the reactor chamber; wherein at least some of the discrete second conduits are arranged between the discrete first conduits.
    Type: Application
    Filed: March 20, 2013
    Publication date: September 25, 2014
    Applicant: ASM Technology Singapore Pte Ltd.
    Inventors: Teng Hock KUAH, Hongbo LIU, Jiuan WEI, Wentao WANG, Jingsheng CHEN, Jiapei DING, Ravindra RAGHAVENDRA, Bubesh Babu JOTHEESWARAN, Meer Saiful HASSAN