Patents by Inventor Megan E. BECK

Megan E. BECK has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20240090244
    Abstract: One aspect of this invention relates to an ohmic-contact-gated transistor (OCGT), comprising a bottom gate electrode formed on a substrate; a first dielectric layer formed on the bottom gate electrode; a thin film formed of a semiconducting material on the first dielectric layer; a bottom contact formed on a part of the thin film; a second dielectric layer conformally grown on the bottom contact to result in a self-aligned dielectric extension from the bottom contact on the thin film; and a top contact formed on the second dielectric layer on the top of the bottom contact and fully overlapping with the dielectric extension to define a device channel in the thin film under the dielectric extension between the bottom contact and the top contact.
    Type: Application
    Filed: January 6, 2022
    Publication date: March 14, 2024
    Inventors: Mark C. Hersam, William A. Gaviria Rojas, Megan E. Beck, Vinod K. Sangwan
  • Patent number: 11605730
    Abstract: A self-aligned short-channel SASC electronic device includes a first semiconductor layer formed on a substrate; a first metal layer formed on a first portion of the first semiconductor layer; a first dielectric layer formed on the first metal layer and extended with a dielectric extension on a second portion of the first semiconductor layer that extends from the first portion of the first semiconductor layer, the dielectric extension defining a channel length of a channel in the first semiconductor layer; and a gate electrode formed on the substrate and capacitively coupled with the channel. The dielectric extension is conformally grown on the first semiconductor layer in a self-aligned manner. The channel length is less than about 800 nm, preferably, less than about 200 nm, more preferably, about 135 nm.
    Type: Grant
    Filed: January 16, 2019
    Date of Patent: March 14, 2023
    Assignee: NORTHWESTERN UNIVERSITY
    Inventors: Mark C. Hersam, Vinod K. Sangwan, Megan E. Beck
  • Publication number: 20230040758
    Abstract: A GHeT includes a bottom gate formed on a substrate; a first dielectric layer (DL) formed on the bottom gate; a monolayer film formed of an atomically thin material on the first DL; a bottom contact (BC) formed on part of the monolayer film; a second DL formed on the BC; a top contact (TC) formed on the second DL on top of the BC; a network of CNTs formed on the TC and the monolayer film, to define an overlap region with the monolayer film; a third DL formed on the CNT network, the monolayer film and the TC; and a top gate formed on the third DL and overlapping with the overlap region. Such GHeT design allows gate tunability of Gaussian peak position, height and width that define Gaussian transfer characteristic, thereby enabling simplified circuit architectures for various spiking neuron functions for emerging neuromorphic applications.
    Type: Application
    Filed: December 22, 2020
    Publication date: February 9, 2023
    Inventors: Mark C. Hersam, Megan E. Beck, Vinod K. Sangwan, Amit R. Trivedi, Ahish Shylendra
  • Publication number: 20200395473
    Abstract: A self-aligned short-channel SASC electronic device includes a first semiconductor layer formed on a substrate; a first metal layer formed on a first portion of the first semiconductor layer; a first dielectric layer formed on the first metal layer and extended with a dielectric extension on a second portion of the first semiconductor layer that extends from the first portion of the first semiconductor layer, the dielectric extension defining a channel length of a channel in the first semiconductor layer; and a gate electrode formed on the substrate and capacitively coupled with the channel. The dielectric extension is conformally grown on the first semiconductor layer in a self-aligned manner. The channel length is less than about 800 nm, preferably, less than about 200 nm, more preferably, about 135 nm.
    Type: Application
    Filed: January 16, 2019
    Publication date: December 17, 2020
    Inventors: Mark C. HERSAM, Vinod K. SANGWAN, Megan E. BECK