Abstract: A process and apparatus to enable the continuous isolation of an organometallic compound, such as trimethylindium from a liquid feedstock. The liquid feedstock is delivered to a distillation column having two heating zones to effect dissociation of the feed stock thereby liberating the organometallic compound, which is collected as a vapor from the top of the column.

Abstract: A process and apparatus to enable the continuous isolation of an organometallic compound, such as trimethylindium form a liquid feedstock. The liquid feedstock is delivered to a distillation column (2) having two heating zones (6, 8) to effect dissociation of the feedstock thereby liberating the organometallic compound which is collected as a vapour form the top (4) of the column.

Abstract: PURPOSE: To improve the evaporation efficiency of a raw material by mounting an element of a porous sintered metal having the pore size smaller than the size of the solid raw material to a port for introducing a carrier gas into a bubbler vessel.

Abstract: A method and apparatus for the bulk delivery of a precursor, such as an organometallic compound, from a bulk container, such as a bubbler (1) to a plurality of reactor sites (12, 14, 16, 18, 20) wherein a carrier gas (2) is introduced into the container (1) of the precursor to pick up the precursor to form a gaseous mixture. The gaseous mixture is then selectively distributed to one or more of a plurality of reactor sites (12, 14, 16, 18, 20). The gaseous mixture may be stored in a reservoir (9) and be drawn by means of a pressure differential or under vacuum to each of the reactor sites, when required.