Patents by Inventor Megu MARUYAMA

Megu MARUYAMA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20220362873
    Abstract: An oxide removing apparatus includes: a chamber; a discharge section configured to discharge a fluid from the chamber; a heating section configured to heat an object; a reducing gas supply section having a gasification device configured to produce a reducing gas; and a controller. The controller controls each component such that, after substantially all the fluid in the chamber is discharged, the reducing gas substantially fills the chamber at a pressure that is equal to or higher than 1000 Pa and lower than a saturated vapor pressure of the reducing gas, while the object is heated.
    Type: Application
    Filed: January 7, 2021
    Publication date: November 17, 2022
    Inventors: Naoto OZAWA, Jun MATSUDA, Megu MARUYAMA
  • Publication number: 20220266367
    Abstract: A soldered product manufacturing device 1 includes a stage 13 on which a substrate W is placed, solder being arranged on the substrate W; a cover 16 configured to cover at least an upper part of the substrate W placed on the stage 13 at a predetermined distance therefrom; a chamber 11 configured to house the stage 13 and the cover 16; a heater 15 configured to heat the substrate W on the stage 13; and a reducing gas supply device 19 configured to supply a reducing gas F. A method for manufacturing a soldered product includes, by using the soldered product manufacturing device 1, placing the substrate W on the stage 13; covering the substrate W placed on the stage 13 with the cover 16; heating the substrate W; and supplying the reducing gas F into the chamber 11.
    Type: Application
    Filed: July 20, 2020
    Publication date: August 25, 2022
    Inventors: Naoto OZAWA, Jun MATSUDA, Megu MARUYAMA, Takayuki SUZUKI, Masanobu NAGAHAMA