Patents by Inventor Megumi ISAJI

Megumi ISAJI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Use of stable isotopes of COto validate cylinder preparation
    Patent number: 11920732
    Abstract: A quality control method for the preparation of dry compressed gas cylinder including passivating and/or preparing the compressed gas cylinder with the technique to be validated, filling the passivated/prepared compressed gas cylinder with gaseous carbon dioxide to a normal working pressure, wherein the gaseous carbon dioxide has a known ?18O isotope ratio, maintaining the pressurized gas cylinder at ambient temperature for a first predetermined period of time, and gradually emptying the pressurized gas cylinder, while simultaneously measuring the ?18O isotopic ratio, wherein a predetermined variation in the measured isotopic ratio of ?18O indicates a properly prepared cylinder.
    Type: Grant
    Filed: March 2, 2020
    Date of Patent: March 5, 2024
    Assignees: Airgas, Inc., America Air Liquide, Inc., L'Air Liquide, Société Anonyme pour l'Etude et l'Exploitation des Procédés Georges Claude
    Inventors: Tracey Jacksier, Mani C. Matthew, Richard A. Socki, Jun Sonobe, Megumi Isaji, James McHale
  • SELECTIVE THERMAL ETCHING METHODS OF METAL OR METAL-CONTAINING MATERIALS FOR SEMICONDUCTOR MANUFACTURING
    Publication number: 20230274947
    Abstract: In described embodiments, methods for selective etching (thermal etching) of metals, especially molybdenum- and tungsten-containing materials, and titanium nitride, using thionyl chloride (SOCl2) as an etching gas at low temperatures and low pressure without a need of plasma, for device manufacturing processes and for process chamber cleanings are disclosed. Methods for cleaning reaction product deposits from interior surface of a reactor chamber or from a substrate within said reaction chamber using thionyl chloride (SOCl2) at low temperatures and low pressure without a need of plasma are also disclosed. An additional co-reactant such as hydrogen may be used in combination with thionyl chloride. The processes are carried out in temperature ranging from approximately 150° C. to approximately 600° C., pressure under<100 Torr without the need of a plasma-activation.
    Type: Application
    Filed: July 13, 2021
    Publication date: August 31, 2023
    Inventors: Rocio Alejandra ARTEAGA MULLER, Masato HIRAI, Rapheal ROCHAT, Jean-Marc GIRARD, Venkateswara R. PALLEM, Nicolas BLASCO, Nicolas GOSSET, Megumi ISAJI
  • THE USE OF STABLE ISOTOPES OF CO2 TO VALIDATE CYLINDER PREPARATION
    Publication number: 20210054970
    Abstract: A quality control method for the preparation of dry compressed gas cylinder including passivating and/or preparing the compressed gas cylinder with the technique to be validated, filling the passivated/prepared compressed gas cylinder with gaseous carbon dioxide to a normal working pressure, wherein the gaseous carbon dioxide has a known ?18O isotope ratio, maintaining the pressurized gas cylinder at ambient temperature for a first predetermined period of time, and gradually emptying the pressurized gas cylinder, while simultaneously measuring the ?18O isotopic ratio, wherein a predetermined variation in the measured isotopic ratio of ?18O indicates a properly prepared cylinder.
    Type: Application
    Filed: March 2, 2020
    Publication date: February 25, 2021
    Inventors: Tracey JACKSIER, Mani C. MATTHEW, Richard A. SOCKI, Jun SONOBE, Megumi ISAJI, James McHALE