Patents by Inventor Megumi Kurihara

Megumi Kurihara has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Processes for the chemical vapor deposition and solvent used for the processes
    Patent number: 5900279
    Abstract: The present invention offers processes for CVD (chemical vapor deposition) that enables one to use a new metallic organic compound as a raw material resource. The present invention involves the steps of: adding a metallic organic compound having a group capable of becoming free to a liquid of a compound having the same group as the group capable of becoming free of the metallic organic compound to prepare a solution; vaporizing the solution; decomposing the metallic organic compound; and depositing a metallic film on a substrate.
    Type: Grant
    Filed: April 18, 1997
    Date of Patent: May 4, 1999
    Assignee: Tri Chemical Laboratory Inc.
    Inventors: Machida Hideaki, Nakagawa Masakazu, Megumi Kurihara, Hiroshi Kokubun, Masamichi Shigyo, Sudoh Hiroshi