Abstract: A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 ?m2 at a magnification of 1000 times is 5 ?m or lower.

Abstract: Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body to the average volume resistivity Rave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.

Abstract: Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body to the average volume resistivity Rave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.

Abstract: Provided are a corrosion-resistant member; a member for an electrostatic chuck; and a process for producing the corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member. The process for producing a corrosion-resistant member includes: mixing aluminum oxide powder and samarium oxide powder with a solvent to prepare a slurry including the aluminum oxide powder and the samarium oxide powder; drying the slurry to prepare a mixed powder including the aluminum powder and the samarium oxide powder, and molding the mixed powder to prepare a green body; and calcinating the green body to prepare a sintered body.

Abstract: Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10?10 m or more.

Abstract: Provided is an electrostatic chuck device in which breakdown between an electrostatic chuck portion and a cooling base portion can be prevented, voltage endurance can be improved, uniformity in the in-plane temperature of a mounting surface of the electrostatic chuck portion where a plate-shaped sample is mounted can be improved, and voltage endurance of a heating member can be improved by applying a uniform voltage between the electrostatic chuck portion and the cooling base portion.

Abstract: Provided are a corrosion-resistant member in which, in a case where the corrosion-resistant member is used as a member for an electrostatic chuck, an adsorption force of the electrostatic chuck can be made to be strong when an electric field is applied and a residual adsorption force of the electrostatic chuck can be made to be weak when the application of the electric field is stopped; a member for an electrostatic chuck; and a process for producing a corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member according to the present invention.

Abstract: Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10?10 m or more.

Abstract: Provided is an electrostatic chuck device in which breakdown between an electrostatic chuck portion and a cooling base portion can be prevented, voltage endurance can be improved, uniformity in the in-plane temperature of a mounting surface of the electrostatic chuck portion where a plate-shaped sample is mounted can be improved, and voltage endurance of a heating member can be improved by applying a uniform voltage between the electrostatic chuck portion and the cooling base portion.

Abstract: A dielectric material which is able to detect a sign of insulation breakdown before use or while in use, and thus is able to predict the insulation breakdown in advance is provided. Such a dielectric material is made of a composite sintered compact in which conductive particles are dispersed in an insulating material, in which in the conductive particles, a particle diameter D10 having a cumulative volume percentage of 10% by volume in a volume particle size distribution is 0.2 ?m or less, a particle diameter D90 having a cumulative volume percentage of 90% by volume is 2 ?m or less, a ratio (D90/D10) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D10 having a cumulative volume percentage of 10% by volume is 3.0 or more, and a ratio (D90/D50) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D50 having a cumulative volume percentage of 50% by volume is 1.4 or more.

Abstract: A dielectric material which is able to detect a sign of insulation breakdown before use or while in use, and thus is able to predict the insulation breakdown in advance is provided. Such a dielectric material is made of a composite sintered compact in which conductive particles are dispersed in an insulating material, in which in the conductive particles, a particle diameter D10 having a cumulative volume percentage of 10% by volume in a volume particle size distribution is 0.2 ?m or less, a particle diameter D90 having a cumulative volume percentage of 90% by volume is 2 ?m or less, a ratio (D90/D10) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D10 having a cumulative volume percentage of 10% by volume is 3.0 or more, and a ratio (D90/D50) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D50 having a cumulative volume percentage of 50% by volume is 1.4 or more.