Patents by Inventor Megumu FUKAZAWA

Megumu FUKAZAWA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Method of manufacturing semiconductor device
    Patent number: 8748198
    Abstract: A focus through a projection lens is corrected to prevent the occurrence of a dimensional error in a pattern due to defocusing. At least one automatic focus correction mark is formed over each of chip patterns formed in a reticle used for exposure. Using one of the automatic focus correction marks located in the center portion of an actual device region, automatic correction of the focus of exposure light is performed. In this manner, a variation in the focus of the exposure light through the center portion of the projection lens, which is more likely to reach a high temperature than an end portion of the projection lens, is detected and corrected.
    Type: Grant
    Filed: June 15, 2012
    Date of Patent: June 10, 2014
    Assignee: Renesas Electronics Corporation
    Inventors: Naoyuki Teramoto, Megumu Fukazawa, Masayuki Kumashiro, Kiyoshi Kawagashira
  • METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
    Publication number: 20120322169
    Abstract: A focus through a projection lens is corrected to prevent the occurrence of a dimensional error in a pattern due to defocusing. At least one automatic focus correction mark is formed over each of chip patterns formed in a reticle used for exposure. Using one of the automatic focus correction marks located in the center portion of an actual device region, automatic correction of the focus of exposure light is performed. In this manner, a variation in the focus of the exposure light through the center portion of the projection lens, which is more likely to reach a high temperature than an end portion of the projection lens, is detected and corrected.
    Type: Application
    Filed: June 15, 2012
    Publication date: December 20, 2012
    Inventors: Naoyuki TERAMOTO, Megumu FUKAZAWA, Masayuki KUMASHIRO, Kiyoshi KAWAGASHIRA