Patents by Inventor Mehdi Yousefi Moghaddam

Mehdi Yousefi Moghaddam has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Mirror array
    Patent number: 10845706
    Abstract: A mirror array, at least some of the mirrors of the array comprising a reflective surface and an arm which extends from a surface opposite to the reflective surface, wherein the mirror array further comprises a support structure provided with a plurality of sensing apparatuses, the sensing apparatuses being configured to measure gaps between the sensing apparatuses and the arms which extend from the mirrors.
    Type: Grant
    Filed: March 8, 2018
    Date of Patent: November 24, 2020
    Assignee: ASML Netherlands B.V.
    Inventors: Marco Matheus Louis Steeghs, Tian Gang, Mehdi Yousefi Moghaddam
  • Mirror Array
    Publication number: 20200033734
    Abstract: A mirror array, at least some of the mirrors of the array comprising a reflective surface and an arm which extends from a surface opposite to the reflective surface, wherein the mirror array further comprises a support structure provided with a plurality of sensing apparatuses, the sensing apparatuses being configured to measure gaps between the sensing apparatuses and the arms which extend from the mirrors.
    Type: Application
    Filed: March 8, 2018
    Publication date: January 30, 2020
    Inventors: Marco, Matheus, Louis Steeghs, Tian Gang, Mehdi Yousefi Moghaddam