Patents by Inventor Mehmet E. Alpay
Mehmet E. Alpay has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).
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Patent number: 11185957Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: GrantFiled: April 21, 2020Date of Patent: November 30, 2021Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian Xu, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Publication number: 20200246929Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: ApplicationFiled: April 21, 2020Publication date: August 6, 2020Inventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian XU, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Patent number: 10654141Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: GrantFiled: April 30, 2018Date of Patent: May 19, 2020Assignee: ELECTRO SCIENTIFIC INDUSTRIES, INCInventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian Xu, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Patent number: 10213871Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.Type: GrantFiled: October 21, 2013Date of Patent: February 26, 2019Assignee: Electro Scientific Industries, Inc.Inventors: Jan Kleinert, Robert Reichenbach, Mark Unrath, Hisashi Matsumoto, Jefferey Howerton, Mehmet E. Alpay, Andy Moore
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Publication number: 20180243872Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: ApplicationFiled: April 30, 2018Publication date: August 30, 2018Inventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian XU, Jan Kleinert, Zhibin Lin, Jim D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Patent number: 9981357Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: GrantFiled: June 21, 2016Date of Patent: May 29, 2018Assignee: Electro Scientific Industries, Inc.Inventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian Xu, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Publication number: 20160368110Abstract: One embodiment of the present invention can be characterized as a method for controlling a multi-axis machine tool that includes obtaining a preliminary rotary actuator command (wherein the rotary actuator command has frequency content exceeding a bandwidth of a rotary actuator), generating a processed rotary actuator command based, at least in part, on the preliminary rotary actuator command, the processed rotary actuator command having frequency content within a bandwidth of the rotary actuator and generating a first linear actuator command and a second linear actuator command based, at least in part, on the processed rotary actuator command. The processed rotary actuator command can be output to the rotary actuator, the first linear actuator command can be output to a first linear actuator and the second linear actuator command can be output to a second linear actuator.Type: ApplicationFiled: June 21, 2016Publication date: December 22, 2016Inventors: Guang Lu, Mehmet E. Alpay, Mike Tyler, Qian XU, Jan Kleinert, Zhibin Lin, James D. Brookhyser, Ho Wai Lo, Kurt M. Eaton
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Patent number: 8878095Abstract: Systems and methods reduce or prevent back-reflections in a laser processing system. A system includes a laser source to generate an incident laser beam, a laser beam output to direct the incident laser beam toward a work surface along a beam path, and a spatial filter. The system further includes a beam expander to expand a diameter of the incident laser beam received through the spatial filter, and a scan lens to focus the expanded incident laser beam at a target location on a work surface. A reflected laser beam from the work surface returns through the scan lens to the beam expander, which reduces a diameter of the reflected beam and increases a divergence angle of the reflected laser beam. The spatial filter blocks a portion of the diverging reflected laser beam from passing through the aperture and returning to the laser beam output.Type: GrantFiled: December 17, 2010Date of Patent: November 4, 2014Assignee: Electro Scientific Industries, Inc.Inventors: Guangyu Li, Mehmet E. Alpay
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Patent number: 8723076Abstract: Systems and methods cut trenches of multiple widths in a material using a single pass of a laser beam. A first series of laser pulses cut a work surface of the material at a first cutting speed using a first spot size. In a transition region from a first trench width to a second trench width, a second series of laser pulses sequentially change spot sizes while gradually changing from the first cutting speed to a second cutting speed. Then, a third series of laser pulses continue to cut the work surface at the second cutting speed using a second spot size. The method provides for increased depth control in the transition region. A system uses a selectively adjustable optical component in the laser beam path to rapidly change spot size by adjusting a position of a focal plane with respect to the work surface.Type: GrantFiled: February 17, 2012Date of Patent: May 13, 2014Assignee: Electro Scientific Industries, Inc.Inventors: Mehmet E. Alpay, Brian Johansen, David Childers
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Publication number: 20140110384Abstract: The invention is a method and an apparatus for marking an article and the article thus marked. It includes providing the article. Generating a plurality of groups of laser pulses. At least one of the plurality of groups is generated by modulating a beam of laser pulses to form a plurality of beamlets. Each, of the plurality of beamlets, include at least one laser pulse. It also includes directing the plurality of groups of laser pulses onto the article such that laser pulses within the at least one of the plurality of groups impinge upon the article at spot areas that do not overlap one another, wherein laser pulses within the plurality of groups are configured to produce a visible mark on the article.Type: ApplicationFiled: October 21, 2013Publication date: April 24, 2014Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Jan Kleinert, Robert Reichenbach, Mark Unrath, Hisashi Matsumoto, Jefferey Howerton, Mehmet E. Alpay, Andy MOORE
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Patent number: 8648277Abstract: Laser direct ablation (LDA) produces patterns cut into a dielectric layer for the formation of electrically conductive traces with controlled signal propagation characteristics. LDA processing includes selecting a dose fluence for removing a desired depth of material along a scribe line on a surface of a workpiece, selecting a temporal pulsewidth for each laser pulse in a series of laser pulses, and selecting a pulse repetition frequency for the series of laser pulse. The pulse repetition frequency is based at least in part on the selected temporal pulsewidth to maintain the selected dose fluence along the scribe line. The selected pulse repetition frequency provides a predetermined minimum overlap of laser spots along the scribe line. The LDA process further includes generating a laser beam including the series of laser pulses according to the selected dose fluence, temporal pulsewidth, and pulse repetition frequency.Type: GrantFiled: March 31, 2011Date of Patent: February 11, 2014Assignee: Electro Scientific Industries, Inc.Inventors: Mehmet E. Alpay, Hisashi Matsumoto, Mark A. Unrath, Guangyu Li
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Patent number: 8481887Abstract: A method for laser machining through micro-holes having desired geometric cross-section requirements in a thin, substantially homogenous material.Type: GrantFiled: April 29, 2008Date of Patent: July 9, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Mehmet E. Alpay, Jeffrey Howerton, Michael Nashner, Ling Wen
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Patent number: 8461482Abstract: A process and apparatus neutralizes a warp effect resulting from a build up of micro strains caused by machining a part with a long wavelength laser. The part to be machined is pre-stressed in an opposite direction of a warp stress due to machining using a fixture for holding the part without yielding any other features in the part. The part is machined while held in the pre-stressed position in the fixture.Type: GrantFiled: June 12, 2009Date of Patent: June 11, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Mark T. Kosmowski, Mehmet E. Alpay
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Patent number: 8461480Abstract: An orthogonal integrated cleaving apparatus and methods of controlling such an apparatus are taught. The cleaving apparatus includes two cleaving devices mounted at right angles with respect to a mount facing a substrate to be processed. The non-metallic and/or brittle substrate is separated along two orthogonal axes without rotating or moving the substrate to a second machine by moving the mount or the substrate along the axes. Each cleaving device laser sequentially heats a surface of the substrate along a respective cutting axis, cools the cut area and then laser re-heats the cut area to form a clean break.Type: GrantFiled: November 30, 2010Date of Patent: June 11, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Mark T. Kosmowski, Mehmet E. Alpay
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Patent number: 8378259Abstract: The embodiments disclosed herein provide systems and methods for correcting a head-to-head offset in a laser machining system with two or more processing heads. A focusing lens is associated with each processing head, and is configured to receive an incident laser beam along an incident beam axis of propagation. The incident beam axis of propagation is offset from the primary axis of the focusing lens. The focusing lens is further configured to rotate about the incident beam axis of propagation in order to steer the incident laser beam's path with respect to a workpiece.Type: GrantFiled: September 30, 2008Date of Patent: February 19, 2013Assignee: Electro Scientific Industries, Inc.Inventors: Yanfei Jiang, Mehmet E. Alpay
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Patent number: 8288684Abstract: A laser micro-machining system includes a laser source positioned to direct a laser pulse through a scan lens to a work piece mounted on a work surface and a mirror positioned between the scan lens and the work piece and tilted with respect to the work surface to reflect the laser pulse toward the work piece. The mirror can be indexed to a number of positions so that only portions of the mirror are used for a number of processing steps, extending the life of the mirror.Type: GrantFiled: April 29, 2008Date of Patent: October 16, 2012Assignee: Electro Scientific Industries, Inc.Inventors: Mehmet E. Alpay, Jeffrey Howerton, Patrick Leonard, Michael Nashner, David McKeever
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Publication number: 20120248075Abstract: Laser direct ablation (LDA) produces patterns cut into a dielectric layer for the formation of electrically conductive traces with controlled signal propagation characteristics. LDA processing includes selecting a dose fluence for removing a desired depth of material along a scribe line on a surface of a workpiece, selecting a temporal pulsewidth for each laser pulse in a series of laser pulses, and selecting a pulse repetition frequency for the series of laser pulse. The pulse repetition frequency is based at least in part on the selected temporal pulsewidth to maintain the selected dose fluence along the scribe line. The selected pulse repetition frequency provides a predetermined minimum overlap of laser spots along the scribe line. The LDA process further includes generating a laser beam including the series of laser pulses according to the selected dose fluence, temporal pulsewidth, and pulse repetition frequency.Type: ApplicationFiled: March 31, 2011Publication date: October 4, 2012Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Mehmet E. Alpay, Hisashi Matsumoto, Mark A. Unrath, Guangyu Li
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Patent number: 8217302Abstract: Systems and methods reduce or prevent back-reflections in a laser processing system. A laser processing system includes a laser source to generate an incident laser beam, a laser beam output to direct the incident laser beam toward a work surface, and a lens to receive the incident laser beam along a first axis of propagation that is substantially perpendicular to the work surface. The lens includes a primary axis that is substantially parallel to, and offset from, the first axis of propagation. The lens is configured to focus the incident laser beam onto the work surface along a second axis of propagation that forms a non-perpendicular angle with the work surface such that at least a substantial portion of a reflected laser beam from the work surface does not return to the laser beam output.Type: GrantFiled: September 12, 2008Date of Patent: July 10, 2012Assignee: Electro Scientific Industries, IncInventors: Mehmet E. Alpay, Brian Johansen
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Publication number: 20120152918Abstract: Systems and methods reduce or prevent back-reflections in a laser processing system. A system includes a laser source to generate an incident laser beam, a laser beam output to direct the incident laser beam toward a work surface along a beam path, and a spatial filter. The system further includes a beam expander to expand a diameter of the incident laser beam received through the spatial filter, and a scan lens to focus the expanded incident laser beam at a target location on a work surface. A reflected laser beam from the work surface returns through the scan lens to the beam expander, which reduces a diameter of the reflected beam and increases a divergence angle of the reflected laser beam. The spatial filter blocks a portion of the diverging reflected laser beam from passing through the aperture and returning to the laser beam output.Type: ApplicationFiled: December 17, 2010Publication date: June 21, 2012Applicant: ELECTRO SCIENTIFIC INDUSTRIES, INC.Inventors: Guangyu Li, Mehmet E. Alpay
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Publication number: 20120145686Abstract: Systems and methods cut trenches of multiple widths in a material using a single pass of a laser beam. A first series of laser pulses cut a work surface of the material at a first cutting speed using a first spot size. In a transition region from a first trench width to a second trench width, a second series of laser pulses sequentially change spot sizes while gradually changing from the first cutting speed to a second cutting speed. Then, a third series of laser pulses continue to cut the work surface at the second cutting speed using a second spot size. The method provides for increased depth control in the transition region. A system uses a selectively adjustable optical component in the laser beam path to rapidly change spot size by adjusting a position of a focal plane with respect to the work surface.Type: ApplicationFiled: February 17, 2012Publication date: June 14, 2012Applicant: Electro Scientific Industries, Inc.Inventors: Mehmet E. ALPAY, Brian JOHANSEN, David CHILDERS