Patents by Inventor Mehran Moalem

Mehran Moalem has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Process for forming silicon carbide films and microcomponents
    Patent number: 5861346
    Abstract: Silicon carbide films and microcomponents are grown on silicon substrates at surface temperatures between 900 K and 1700 K via C.sub.60 precursors in a hydrogen-free environment. Selective crystalline silicon carbide growth can be achieved on patterned silicon-silicon oxide samples. Patterned SiC films are produced by making use of the high reaction probability of C.sub.60 with silicon at surface temperatures greater than 900 K and the negligible reaction probability for C.sub.60 on silicon dioxide at surface temperatures less than 1250 K.
    Type: Grant
    Filed: July 27, 1995
    Date of Patent: January 19, 1999
    Assignee: Regents of the University of California
    Inventors: Alex V. Hamza, Mehdi Balooch, Mehran Moalem