Patents by Inventor Mehrdad HOSNI

Mehrdad HOSNI has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Apparatus of supplying slurry for planarization process and chemical-mechanical-polishing system including the same
    Patent number: 11020839
    Abstract: An apparatus of supplying slurry for a planarization process includes a housing having a first side and a second side and channels extending through the housing from the first side to the second side along a first direction. The channels include a first channel connecting a first inlet on the first side and a first outlet on the second side, a second channel connecting a second outlet on the first side and a second inlet on the second side, a third channel connecting a third inlet on the first side and a third outlet on the second side, and a fourth channel connecting a fourth outlet on the first side and a fourth inlet on the second side. An intermediate portion of the second channel crisscrosses an intermediate portion of the third channel along a second direction crossing the first direction.
    Type: Grant
    Filed: August 20, 2018
    Date of Patent: June 1, 2021
    Inventors: Achala Akuretiya, Mehrdad Hosni
  • APPARATUS OF SUPPLYING SLURRY FOR PLANARIZATION PROCESS AND CHEMICAL-MECHANICAL-POLISHING SYSTEM INCLUDING THE SAME
    Publication number: 20190381631
    Abstract: An apparatus of supplying slurry for a planarization process includes a housing having a first side and a second side and channels extending through the housing from the first side to the second side along a first direction. The channels include a first channel connecting a first inlet on the first side and a first outlet on the second side, a second channel connecting a second outlet on the first side and a second inlet on the second side, a third channel connecting a third inlet on the first side and a third outlet on the second side, and a fourth channel connecting a fourth outlet on the first side and a fourth inlet on the second side. An intermediate portion of the second channel crisscrosses an intermediate portion of the third channel along a second direction crossing the first direction.
    Type: Application
    Filed: August 20, 2018
    Publication date: December 19, 2019
    Inventors: Achala AKURETIYA, Mehrdad HOSNI