Abstract: A probing apparatus comprises a platform with a rectangular opening, two vertical rails positioned at two sides of the rectangular opening, two vertical sliding modules each including a vertical sliding base positioned on the vertical rail, a bearing member and a pivot connecting the vertical sliding base and the bearing member, at least one non-circular lateral rail with two ends positioned on the bearing member of the vertical sliding module, at least one lateral sliding module each including a lateral sliding base positioned on the lateral rail and a hanger positioned on the lateral sliding base, and at least one tunable stage configured to hang on the non-circular lateral rail via the hanger of the lateral sliding module.

Abstract: A probing apparatus comprises a platform with a rectangular opening, two vertical rails positioned at two sides of the rectangular opening, two vertical sliding modules each including a vertical sliding base positioned on the vertical rail, a bearing member and a pivot connecting the vertical sliding base and the bearing member, at least one non-circular lateral rail with two ends positioned on the bearing member of the vertical sliding module, at least one lateral sliding module each including a lateral sliding base positioned on the lateral rail and a hanger positioned on the lateral sliding base, and at least one tunable stage configured to hang on the non-circular lateral rail via the hanger of the lateral sliding module.

Abstract: The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.

Abstract: The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.

Abstract: A probe card for integrated circuit devices comprises a printed circuit board, at least one probe pin positioned on the printed circuit board, and at least one ultrasonic generator configured to generate ultrasonic energy. When the probe pin contacts a pad, the ultrasonic generator emits ultrasonic energy to vibrate the probe pin so as to form a recess on the surface of a dielectric layer such as an oxide layer on the pad, and the probe pin is then pressed downward to scratch the dielectric layer to form a signal channel. While some contaminants such as oxide fragments usually adhere to the probe pin when the probe card is used to perform an electrical test of the integrated circuit device, the present invention can use ultrasonic energy to vibrate the probe pin so as to remove contaminants from the probe pin.

Abstract: The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.

Abstract: The present probing apparatus includes a platform with a rectangular opening, two slides positioned at two sides of the opening in a parallel manner, at least one non-circular beam and at least one tunable stage positioned on the non-circular beam. The non-circular beam is preferably a rectangular beam with two ends positioned on the two slides through two first sliding bases, respectively. The tunable stage comprises a carrier for loading a probe card, a first driving module for adjusting a relative position along x-axis between the probe card and the device under test (DUT), a second driving module for adjusting a relative position along y-axis between the probe card and the DUT, a third driving module for adjusting a relative position along z-axis between the probe card and the DUT, and an angular adjusting module for adjusting an angle between the probe card and the DUT.

Abstract: The present probe card comprises a circuit board, a platform fixed on the circuit board, a tunable stage positioned on the platform, a probe carrier positioned on the tunable stage and at least one probe positioned on the probe carrier. The tunable stage comprises a stationary part positioned on the platform, a movable part for loading the probe carrier and a driving mechanism connecting the stationary part and the movable part. The probe carrier is positioned on the movable part and the relative position between the probe on the probe carrier and a DUT can be adjusted by the driving mechanism.

Abstract: This disclosure provides a probe card for electrical testing a chip in a wide temperature range. The probe card includes a circuit board, a cover, a circular supporter positioned on the circuit board, at least a probe needle fixed on the circular supporter by an adhesive, and a flow line positioned in the space between the circuit board and the cover. Embodiments of the invention moderates the temperature of the probe card by introducing a fluid such as, for example, forced-air or nitrogen into the flow line to carry heat into or out of the probe card.

Abstract: The present invention provides a probe card for testing a semiconductor. The probe card includes a circuit board, a cover, a circular supporter positioned on the circuit board, at least a probe needle fixed on the circular supporter by an adhesive, and a flow line positioned in the space formed between the circuit board and the cover. The present invention moderates the temperature of the probe card by introducing a fluid such as force-air or nitrogen into the flow line to carry heat into or out of the probe card.

Abstract: The present invention discloses a probe card, which includes one substrate and one conductive layer with a circuit pattern on the conductive layer. The probe card is characterized in that a gap is located between the circuits of the circuit pattern. The gap has a predetermined depth from the surface level of the substrate to isolate the circuits by the air to increase the resistance of the probe card and reduce the parasitic capacitance so as to improve the precision of the measurement. Since the gaps between the circuit patterns are formed by an engraving process, the leakage current effect due to a fault etching in prior art is avoided thereof.