Patents by Inventor Meitoku AlBARA

Meitoku AlBARA has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING SYSTEM, AND MEMORY MEDIUM
    Publication number: 20180182610
    Abstract: A method for cleaning a substrate includes supplying to a substrate a film-forming processing liquid which includes a volatile component and forms a film on the substrate, vaporizing the volatile component in the film-forming processing liquid such that the film-forming processing liquid solidifies or cures on the substrate and forms a processing film on the substrate, supplying to the substrate having the processing film a strip-processing liquid which strips the processing film from the substrate, and supplying to the processing film formed on the substrate a dissolving-processing liquid which dissolves the processing film after the supplying of the strip-processing liquid.
    Type: Application
    Filed: February 26, 2018
    Publication date: June 28, 2018
    Applicant: TOKYO ELECTRON LIMITED
    Inventors: Miyako KANEKO, Keiji TANOUCHI, Takehiko ORll, ltaru KANNO, Meitoku AlBARA, Satoru TANAKA