Patents by Inventor Melanie S. Reyes

Melanie S. Reyes has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • PHOTORESIST AND ANTIREFLECTIVE LAYER REMOVAL SOLUTION AND METHOD THEREOF
    Publication number: 20090241988
    Abstract: An aqueous solution composition may include an organic base hydroxide, potassium hydroxide, a compound selected from the group of compounds consisting of 2-mercaptobenzimidazole, 1-Phenyl-1H-tetrazole-5-thiol and 2-MerCaptoBenzoThiazole, hydrogen peroxide and deionized water. A method for removing photoresist and anti-reflective coating from a wafer using such a solution is also disclosed.
    Type: Application
    Filed: March 31, 2008
    Publication date: October 1, 2009
    Inventors: Vijayakumar S. RAMACHANDRARAO, Melanie S. Reyes, Shan Clark, John O'Sullivan