Patents by Inventor Mello Hebert

Mello Hebert has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Anti-reflective coating for photolithography and methods of preparation thereof
    Patent number: 9069133
    Abstract: Anti-reflective coating materials for ultraviolet photolithography include at least one absorbing compound and at least one material modification agent, such as at least one porogen, at least one high-boiling solvent, at least one capping agent, at least one leveling agent, at least one catalyst, at least one replacement solvent, at least one pH tuning agent, and/or a combination thereof that are incorporated into inorganic-based materials or inorganic compositions and/or compounds. Suitable absorbing compounds are those that absorb around wavelengths such as 365 nm, 248 nm, 193 nm and 157 nm that may be used in photolithography.
    Type: Grant
    Filed: November 12, 2002
    Date of Patent: June 30, 2015
    Assignee: Honeywell International Inc.
    Inventors: Teresa Baldwin, Joseph Kennedy, Nancy Iwamoto, Tadashi Nakano, William Bedwell, Jason Stuck, Arlene Suedemeyer, Mello Hebert
  • Anti-Reflective Coating for Photolithography and Methods of Preparation Thereof
    Publication number: 20140227538
    Abstract: Anti-reflective coating materials for ultraviolet photolithography include at least one absorbing compound and at least one material modification agent, such as at least one porogen, at least one high-boiling solvent, at least one capping agent, at least one leveling agent, at least one catalyst, at least one replacement solvent, at least one pH tuning agent, and/or a combination thereof that are incorporated into inorganic-based materials or inorganic compositions and/or compounds.
    Type: Application
    Filed: November 12, 2002
    Publication date: August 14, 2014
    Applicant: HONEYWELL INTERNATIONAL INC.
    Inventors: Teresa Baldwin, Joseph Kennedy, Nancy Iwamoto, Tadashi Nakano, William Bedwell, Jason Stuck, Arlene Suedmeyer, Mello Hebert