Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and a generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: Planar magnetron targets are disclosed which include a backing plate which is grooved in the regions where erosion of the target material mainly occurs, thereby permitting greater erosion depth of the target material. The life of the target material may be further extended by employing an in-relief upper surface for the target material. The in-relief surface may be prepared by a number of well-known techniques, which include casting and computer-controlled plasma spray. The target material may be either sprayed on or bonded to the backing plate. For a preferred embodiment of the invention, the backing plate is grooved to create undercut ledges which retain the target material on the backing plate, even if adhesion between the surfaces of the target material and the backing plate material fails as the result of thermal cycling.

Abstract: A fluid-tight union for reversably interconnecting lengths of coaxial pipe includes: a first annular fitting, having a circumferential flange, attachable to a connection end of a first length of pipe; a second annular fitting, having a circumferential shoulder, attachable to a connection end of a second length of pipe; a clamping collar comprised of arcuate segments which incorporate both an inwardly-angled clamping ledge that engages an overhanging step on the circumferential shoulder of the second annular fitting and at least one internal, inwardly-angled, spiral, circumferential thread spaced apart from the clamping ledge; and a retainer ring sized so as to be slidable over the first annular fitting, and rotatable against the rear face of the circumferential flange, the retainer ring incorporating external, spiral, circumferential threads that are angled away from the flange, the external threads of the retainer ring engaging the internal threads of the clamping collar to draw the clamping ledge and engage

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and a generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.

Abstract: A fluid-tight pipe union includes: first and second annular fittings attachable to a connection ends of first and second lengths of pipe, respectively, the fitting mating together at a junction, the first fitting incorporating a circumferential flange, said flange having a rear face and front face which faces said second length of pipe, the second fitting having a circumferential shoulder terminating in an inwardly-angled, overhanging circumferential step that faces away from said junction; a clamping collar comprised of arcuate segments, which are collectively sized to generally and coaxially surround both said first and second fittings, the collar incorporating, both an inwardly-angled clamping ledge that engages the overhanging step of the second fitting and at least one internal, inwardly-angled, spiral, circumferential thread spaced apart from said clamping ledge; and a retainer ring sized so as to be slidable over said first fitting, and rotatable against the rear face of said circumferential flange, sa

Abstract: An improved interconnection system for attaching an improved cylindrical magnetron target to a rotatable flanged spindle incorporates an annular extension on the target, which fits over the edge of the spindle flange, facilitates centering the target on the spindle, and helps shield target sealing surfaces. The annular extension terminates in an inwardly-angled circumferential step. The target-spindle interconnection system includes a split clamping collar and generally annular retainer ring that slidable over the spindle shaft and rotatable against the spindle flange, the retainer ring having external circumferential threads that are angled away from the flange. The split clamping collar has, at one end, an inwardly-angled lip that engages the overhanging step and, at the other end, inwardly-angled, internal, circumferential threads that engage the threads of the retainer ring to draw the target and spindle together as a unified assembly as the retainer ring is rotated.