Patents by Inventor MEMSENSING MICROSYSTEMS TECHNOLOGY CO.,LTD.

MEMSENSING MICROSYSTEMS TECHNOLOGY CO.,LTD. has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • Publication number: 20130221456
    Abstract: A capacitance type micro-silicon microphone includes a base, a backplate and a diaphragm positioned above the backplate in a suspended manner. The base includes a top face, a bottom face and a number of sound bores recessing inwardly from the top face. Bottom sides of the sound bores are in communication with each other so as to form an upper cavity. The base defines at least one lower cavity recessing inwardly from the bottom face. The backplate is positioned above the upper cavity in a suspended manner. The lower cavity is in communication with the upper cavity so as to jointly form a back cavity of the capacitance type micro-silicon microphone. Besides, a method for fabricating the capacitance type micro-silicon microphone is also disclosed.
    Type: Application
    Filed: February 19, 2013
    Publication date: August 29, 2013
    Applicant: MEMSENSING MICROSYSTEMS TECHNOLOGY CO., LTD.
    Inventor: MEMSENSING MICROSYSTEMS TECHNOLOGY CO.,LTD.