Patents by Inventor Men-Han LEE

Men-Han LEE has filed for patents to protect the following inventions. This listing includes patent applications that are pending as well as patents that have already been granted by the United States Patent and Trademark Office (USPTO).

  • METHOD OF ALIGNING WAFER
    Publication number: 20220005721
    Abstract: A method of aligning a wafer includes defining a reference direction for aligning the wafer; capturing an image of the wafer held on a chuck; using an identifying module to analyze a straight line on the image of the wafer; calculating an offset angle between the straight line and the reference direction; and calibrating the offset angle to align the straight line with the reference direction by way rotating the chuck.
    Type: Application
    Filed: July 2, 2020
    Publication date: January 6, 2022
    Inventors: Yung-Chin LIU, Chien-Hung CHEN, Men-Han LEE